JPH0610685Y2 - ウエハ移し換え装置 - Google Patents
ウエハ移し換え装置Info
- Publication number
- JPH0610685Y2 JPH0610685Y2 JP1984186786U JP18678684U JPH0610685Y2 JP H0610685 Y2 JPH0610685 Y2 JP H0610685Y2 JP 1984186786 U JP1984186786 U JP 1984186786U JP 18678684 U JP18678684 U JP 18678684U JP H0610685 Y2 JPH0610685 Y2 JP H0610685Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer chuck
- rod
- chuck
- movement mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984186786U JPH0610685Y2 (ja) | 1984-12-11 | 1984-12-11 | ウエハ移し換え装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984186786U JPH0610685Y2 (ja) | 1984-12-11 | 1984-12-11 | ウエハ移し換え装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61102044U JPS61102044U (US06521211-20030218-C00004.png) | 1986-06-28 |
JPH0610685Y2 true JPH0610685Y2 (ja) | 1994-03-16 |
Family
ID=30744255
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1984186786U Expired - Lifetime JPH0610685Y2 (ja) | 1984-12-11 | 1984-12-11 | ウエハ移し換え装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0610685Y2 (US06521211-20030218-C00004.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112635377A (zh) * | 2020-12-25 | 2021-04-09 | 上海广川科技有限公司 | 一种等间距调节模组 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61131465A (ja) * | 1984-11-30 | 1986-06-19 | Tomuko:Kk | ウエハ移換え装置 |
-
1984
- 1984-12-11 JP JP1984186786U patent/JPH0610685Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS61102044U (US06521211-20030218-C00004.png) | 1986-06-28 |
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