JPH059339B2 - - Google Patents
Info
- Publication number
- JPH059339B2 JPH059339B2 JP14615087A JP14615087A JPH059339B2 JP H059339 B2 JPH059339 B2 JP H059339B2 JP 14615087 A JP14615087 A JP 14615087A JP 14615087 A JP14615087 A JP 14615087A JP H059339 B2 JPH059339 B2 JP H059339B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- handling plate
- rotating shaft
- handling
- carriage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000032258 transport Effects 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 description 35
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 27
- 229910052710 silicon Inorganic materials 0.000 description 27
- 239000010703 silicon Substances 0.000 description 27
- 238000000034 method Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 230000002441 reversible effect Effects 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Registering Or Overturning Sheets (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Specific Conveyance Elements (AREA)
- Attitude Control For Articles On Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62146150A JPS63310429A (ja) | 1987-06-11 | 1987-06-11 | 搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62146150A JPS63310429A (ja) | 1987-06-11 | 1987-06-11 | 搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63310429A JPS63310429A (ja) | 1988-12-19 |
| JPH059339B2 true JPH059339B2 (US20020095090A1-20020718-M00002.png) | 1993-02-04 |
Family
ID=15401264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62146150A Granted JPS63310429A (ja) | 1987-06-11 | 1987-06-11 | 搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63310429A (US20020095090A1-20020718-M00002.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06315418A (ja) * | 1993-05-07 | 1994-11-15 | Sekisui Chem Co Ltd | 補助具付流し台 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2719718B2 (ja) * | 1989-03-20 | 1998-02-25 | 東京エレクトロン株式会社 | 熱処理装置 |
| CN107968064B (zh) * | 2017-11-27 | 2019-12-27 | 乐山新天源太阳能科技有限公司 | 硅片制绒转运装置 |
| CN108639725B (zh) * | 2018-07-03 | 2024-03-22 | 恒劢安全防护用品（南通）有限公司 | 一种手套浸胶线的手模条输送带 |
| CN111776739B (zh) * | 2020-07-23 | 2021-01-29 | 北京天圣华信息技术有限责任公司 | 一种高效的物流分拣用小型智能化机械臂 |
-
1987
- 1987-06-11 JP JP62146150A patent/JPS63310429A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06315418A (ja) * | 1993-05-07 | 1994-11-15 | Sekisui Chem Co Ltd | 補助具付流し台 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63310429A (ja) | 1988-12-19 |
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