JPH0587007B2 - - Google Patents
Info
- Publication number
- JPH0587007B2 JPH0587007B2 JP61020228A JP2022886A JPH0587007B2 JP H0587007 B2 JPH0587007 B2 JP H0587007B2 JP 61020228 A JP61020228 A JP 61020228A JP 2022886 A JP2022886 A JP 2022886A JP H0587007 B2 JPH0587007 B2 JP H0587007B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- unit
- mask
- cpu
- wafer transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 11
- 239000000470 constituent Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 69
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000032258 transport Effects 0.000 description 6
- 238000004891 communication Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 238000011084 recovery Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61020228A JPS62179116A (ja) | 1986-02-03 | 1986-02-03 | 半導体製造装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61020228A JPS62179116A (ja) | 1986-02-03 | 1986-02-03 | 半導体製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62179116A JPS62179116A (ja) | 1987-08-06 |
JPH0587007B2 true JPH0587007B2 (de) | 1993-12-15 |
Family
ID=12021311
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61020228A Granted JPS62179116A (ja) | 1986-02-03 | 1986-02-03 | 半導体製造装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62179116A (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4983241A (en) * | 1988-01-28 | 1991-01-08 | Fuji Photo Film Co., Ltd. | Method of splicing webs |
JPH0491423A (ja) * | 1990-08-02 | 1992-03-24 | Canon Inc | 半導体露光装置 |
KR100698035B1 (ko) * | 2002-03-23 | 2007-03-23 | 엘지.필립스 엘시디 주식회사 | 액정표시소자용 합착 장치 및 원점 설정 방법 |
JP5572821B2 (ja) * | 2009-09-25 | 2014-08-20 | 株式会社ソフイア | 遊技機 |
JP5286491B2 (ja) * | 2009-09-25 | 2013-09-11 | 株式会社ソフイア | 遊技機 |
JP5572885B2 (ja) * | 2009-11-17 | 2014-08-20 | 株式会社ソフイア | 遊技機 |
JP5572886B2 (ja) * | 2009-11-17 | 2014-08-20 | 株式会社ソフイア | 遊技機 |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52152116A (en) * | 1976-06-14 | 1977-12-17 | Toshiba Corp | Information processing unit |
JPS55154641A (en) * | 1979-05-22 | 1980-12-02 | Toshiba Corp | Initializing system in multiprocessor system |
JPS58112117A (ja) * | 1981-12-25 | 1983-07-04 | Fujitsu Ten Ltd | 処理装置のリセツト回路 |
JPS5979370A (ja) * | 1982-10-28 | 1984-05-08 | Fuji Electric Co Ltd | マルチプロセツサ制御方式 |
JPS59165171A (ja) * | 1983-03-11 | 1984-09-18 | Hitachi Ltd | マルチプロセツサシステムにおける個別リセツト方式 |
JPS6017501A (ja) * | 1983-07-08 | 1985-01-29 | Toshiba Corp | プロセス制御装置のシ−ケンス制御方式 |
JPS60150105A (ja) * | 1984-01-18 | 1985-08-07 | Hitachi Ltd | 動作シ−ケンスの異常回復方式 |
JPS60209817A (ja) * | 1984-04-02 | 1985-10-22 | Meidensha Electric Mfg Co Ltd | 無人車の車載制御装置 |
JPS60222949A (ja) * | 1984-03-12 | 1985-11-07 | テ−ガル・コ−ポレ−シヨン | モジユ−ルの存在センサ |
JPS60247760A (ja) * | 1984-05-23 | 1985-12-07 | Hitachi Ltd | デ−タ通信システム |
JPS60252934A (ja) * | 1984-05-29 | 1985-12-13 | Omron Tateisi Electronics Co | イニシヤルリセツト制御装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0313783Y2 (de) * | 1981-03-30 | 1991-03-28 | ||
JPS57194115U (de) * | 1981-05-30 | 1982-12-09 |
-
1986
- 1986-02-03 JP JP61020228A patent/JPS62179116A/ja active Granted
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52152116A (en) * | 1976-06-14 | 1977-12-17 | Toshiba Corp | Information processing unit |
JPS55154641A (en) * | 1979-05-22 | 1980-12-02 | Toshiba Corp | Initializing system in multiprocessor system |
JPS58112117A (ja) * | 1981-12-25 | 1983-07-04 | Fujitsu Ten Ltd | 処理装置のリセツト回路 |
JPS5979370A (ja) * | 1982-10-28 | 1984-05-08 | Fuji Electric Co Ltd | マルチプロセツサ制御方式 |
JPS59165171A (ja) * | 1983-03-11 | 1984-09-18 | Hitachi Ltd | マルチプロセツサシステムにおける個別リセツト方式 |
JPS6017501A (ja) * | 1983-07-08 | 1985-01-29 | Toshiba Corp | プロセス制御装置のシ−ケンス制御方式 |
JPS60150105A (ja) * | 1984-01-18 | 1985-08-07 | Hitachi Ltd | 動作シ−ケンスの異常回復方式 |
JPS60222949A (ja) * | 1984-03-12 | 1985-11-07 | テ−ガル・コ−ポレ−シヨン | モジユ−ルの存在センサ |
JPS60209817A (ja) * | 1984-04-02 | 1985-10-22 | Meidensha Electric Mfg Co Ltd | 無人車の車載制御装置 |
JPS60247760A (ja) * | 1984-05-23 | 1985-12-07 | Hitachi Ltd | デ−タ通信システム |
JPS60252934A (ja) * | 1984-05-29 | 1985-12-13 | Omron Tateisi Electronics Co | イニシヤルリセツト制御装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS62179116A (ja) | 1987-08-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |