JPH0582907B2 - - Google Patents

Info

Publication number
JPH0582907B2
JPH0582907B2 JP61063116A JP6311686A JPH0582907B2 JP H0582907 B2 JPH0582907 B2 JP H0582907B2 JP 61063116 A JP61063116 A JP 61063116A JP 6311686 A JP6311686 A JP 6311686A JP H0582907 B2 JPH0582907 B2 JP H0582907B2
Authority
JP
Japan
Prior art keywords
housing
hollow shaft
grooves
gas
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61063116A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62218889A (ja
Inventor
Hideki Okaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSK Ltd
Original Assignee
NSK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NSK Ltd filed Critical NSK Ltd
Priority to JP6311686A priority Critical patent/JPS62218889A/ja
Publication of JPS62218889A publication Critical patent/JPS62218889A/ja
Publication of JPH0582907B2 publication Critical patent/JPH0582907B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP6311686A 1986-03-20 1986-03-20 真空吸着機構付き静圧気体軸受スピンドル Granted JPS62218889A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6311686A JPS62218889A (ja) 1986-03-20 1986-03-20 真空吸着機構付き静圧気体軸受スピンドル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6311686A JPS62218889A (ja) 1986-03-20 1986-03-20 真空吸着機構付き静圧気体軸受スピンドル

Publications (2)

Publication Number Publication Date
JPS62218889A JPS62218889A (ja) 1987-09-26
JPH0582907B2 true JPH0582907B2 (bg) 1993-11-22

Family

ID=13219991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6311686A Granted JPS62218889A (ja) 1986-03-20 1986-03-20 真空吸着機構付き静圧気体軸受スピンドル

Country Status (1)

Country Link
JP (1) JPS62218889A (bg)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0257721A (ja) * 1988-08-22 1990-02-27 Canon Inc 真空用エアーベアリング
JP2004257499A (ja) * 2003-02-27 2004-09-16 Pentax Corp スピンドル装置の冷却構造
US9255642B2 (en) 2012-07-06 2016-02-09 General Electric Company Aerodynamic seals for rotary machine
US9587746B2 (en) 2012-07-31 2017-03-07 General Electric Company Film riding seals for rotary machines
CN103016529B (zh) * 2012-12-31 2015-02-18 浙江工业大学 不受气管扰动和高压气体影响的气浮组合装置
CN103016530B (zh) * 2012-12-31 2014-12-10 浙江工业大学 无气管弯曲扰动影响的旋转供气装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5755567A (en) * 1980-09-22 1982-04-02 Matsushita Electric Ind Co Ltd Tracking controller
JPS5928745U (ja) * 1982-08-12 1984-02-22 シャープ株式会社 カ−ド読取装置のストツパ−機構
JPS59219152A (ja) * 1983-05-26 1984-12-10 Matsushita Electric Ind Co Ltd 研磨加工機
JPS59219155A (ja) * 1983-05-26 1984-12-10 Matsushita Electric Ind Co Ltd 研磨加工機
JPS629805A (ja) * 1985-07-03 1987-01-17 Hitachi Ltd 空気軸受型回転継手
JPS62193704A (ja) * 1986-02-20 1987-08-25 Hitachi Ltd 超精密旋盤

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62889Y2 (bg) * 1980-11-26 1987-01-10

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5755567A (en) * 1980-09-22 1982-04-02 Matsushita Electric Ind Co Ltd Tracking controller
JPS5928745U (ja) * 1982-08-12 1984-02-22 シャープ株式会社 カ−ド読取装置のストツパ−機構
JPS59219152A (ja) * 1983-05-26 1984-12-10 Matsushita Electric Ind Co Ltd 研磨加工機
JPS59219155A (ja) * 1983-05-26 1984-12-10 Matsushita Electric Ind Co Ltd 研磨加工機
JPS629805A (ja) * 1985-07-03 1987-01-17 Hitachi Ltd 空気軸受型回転継手
JPS62193704A (ja) * 1986-02-20 1987-08-25 Hitachi Ltd 超精密旋盤

Also Published As

Publication number Publication date
JPS62218889A (ja) 1987-09-26

Similar Documents

Publication Publication Date Title
US6402387B2 (en) Double seal bearing
JP4722340B2 (ja) 動圧シール装置及びこれを用いたロータリジョイント装置
JPH03149410A (ja) 動圧軸受装置
JPH0582907B2 (bg)
KR200145217Y1 (ko) 공기 동압 베어링
JP3547844B2 (ja) 流体動圧軸受
JP3827495B2 (ja) 静圧気体軸受装置
JP2605638Y2 (ja) 静圧主軸の軸受構造
JPH03292413A (ja) 多孔質体軸受ユニット
JPH017917Y2 (bg)
JPH06200940A (ja) 磁性流体軸受を用いたスピンドル装置
JPS62288719A (ja) 動圧スラスト軸受
JPS62141309A (ja) 多孔質静圧気体軸受
JPH06173952A (ja) 静圧流体軸受
JP2000145778A (ja) 真空吸着機構付き静圧気体軸受装置
JPH0225019Y2 (bg)
JPH1030729A (ja) メカニカルシール
JPH05292700A (ja) エアスピンドルユニット
JPS62203990A (ja) ル−ツ形ポンプ
JPS6131327B2 (bg)
JPH02304214A (ja) 流体動圧軸受装置
JPH10318260A (ja) 静圧軸受け
JP2542995Y2 (ja) キャンドモータホンプの軸受支持装置
JPS6326605Y2 (bg)
JPH0515651Y2 (bg)