JPH0582473B2 - - Google Patents

Info

Publication number
JPH0582473B2
JPH0582473B2 JP59278520A JP27852084A JPH0582473B2 JP H0582473 B2 JPH0582473 B2 JP H0582473B2 JP 59278520 A JP59278520 A JP 59278520A JP 27852084 A JP27852084 A JP 27852084A JP H0582473 B2 JPH0582473 B2 JP H0582473B2
Authority
JP
Japan
Prior art keywords
borazine
boron nitride
coating layer
substrate
hydrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59278520A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61153279A (ja
Inventor
Masaru Yagi
Noritoshi Horie
Yoshitaka Maekawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tungaloy Corp
Original Assignee
Toshiba Tungaloy Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Tungaloy Co Ltd filed Critical Toshiba Tungaloy Co Ltd
Priority to JP27852084A priority Critical patent/JPS61153279A/ja
Publication of JPS61153279A publication Critical patent/JPS61153279A/ja
Publication of JPH0582473B2 publication Critical patent/JPH0582473B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP27852084A 1984-12-27 1984-12-27 硬質窒化ホウ素被覆材料の製造方法 Granted JPS61153279A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27852084A JPS61153279A (ja) 1984-12-27 1984-12-27 硬質窒化ホウ素被覆材料の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27852084A JPS61153279A (ja) 1984-12-27 1984-12-27 硬質窒化ホウ素被覆材料の製造方法

Publications (2)

Publication Number Publication Date
JPS61153279A JPS61153279A (ja) 1986-07-11
JPH0582473B2 true JPH0582473B2 (enExample) 1993-11-19

Family

ID=17598429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27852084A Granted JPS61153279A (ja) 1984-12-27 1984-12-27 硬質窒化ホウ素被覆材料の製造方法

Country Status (1)

Country Link
JP (1) JPS61153279A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61275198A (ja) * 1985-05-30 1986-12-05 Mitsubishi Metal Corp 窒化ほう素被膜の析出形成方法
DE59007568D1 (de) * 1990-04-06 1994-12-01 Siemens Ag Verfahren zur Herstellung von mikrokristallin kubischen Bornitridschichten.
DE19714014A1 (de) * 1997-04-04 1998-10-08 Max Planck Gesellschaft Herstellung dünner Schichten aus kubischem Bornitrid
DE19750107C1 (de) * 1997-11-12 1999-04-15 Bosch Gmbh Robert Bornitrid-Dichtungskörper und Verfahren zur Herstellung und Verwendung desselben

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61149478A (ja) * 1984-12-25 1986-07-08 Furukawa Mining Co Ltd 六方晶乃至立方晶の窒化ホウ素膜の製造方法

Also Published As

Publication number Publication date
JPS61153279A (ja) 1986-07-11

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