JPH0580833B2 - - Google Patents

Info

Publication number
JPH0580833B2
JPH0580833B2 JP60081571A JP8157185A JPH0580833B2 JP H0580833 B2 JPH0580833 B2 JP H0580833B2 JP 60081571 A JP60081571 A JP 60081571A JP 8157185 A JP8157185 A JP 8157185A JP H0580833 B2 JPH0580833 B2 JP H0580833B2
Authority
JP
Japan
Prior art keywords
epitaxial growth
type
manufacturing
film
conductivity type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60081571A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61240681A (ja
Inventor
Mitsuru Hanakura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meidensha Corp
Meidensha Electric Manufacturing Co Ltd
Shingijutsu Kaihatsu Jigyodan
Original Assignee
Meidensha Corp
Meidensha Electric Manufacturing Co Ltd
Shingijutsu Kaihatsu Jigyodan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meidensha Corp, Meidensha Electric Manufacturing Co Ltd, Shingijutsu Kaihatsu Jigyodan filed Critical Meidensha Corp
Priority to JP60081571A priority Critical patent/JPS61240681A/ja
Publication of JPS61240681A publication Critical patent/JPS61240681A/ja
Publication of JPH0580833B2 publication Critical patent/JPH0580833B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thyristors (AREA)
JP60081571A 1985-04-17 1985-04-17 半導体素子の製造方法 Granted JPS61240681A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60081571A JPS61240681A (ja) 1985-04-17 1985-04-17 半導体素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60081571A JPS61240681A (ja) 1985-04-17 1985-04-17 半導体素子の製造方法

Publications (2)

Publication Number Publication Date
JPS61240681A JPS61240681A (ja) 1986-10-25
JPH0580833B2 true JPH0580833B2 (enrdf_load_stackoverflow) 1993-11-10

Family

ID=13749987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60081571A Granted JPS61240681A (ja) 1985-04-17 1985-04-17 半導体素子の製造方法

Country Status (1)

Country Link
JP (1) JPS61240681A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS61240681A (ja) 1986-10-25

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