JPS61240681A - 半導体素子の製造方法 - Google Patents

半導体素子の製造方法

Info

Publication number
JPS61240681A
JPS61240681A JP60081571A JP8157185A JPS61240681A JP S61240681 A JPS61240681 A JP S61240681A JP 60081571 A JP60081571 A JP 60081571A JP 8157185 A JP8157185 A JP 8157185A JP S61240681 A JPS61240681 A JP S61240681A
Authority
JP
Japan
Prior art keywords
epitaxial growth
manufacturing
type
diffusion
conductivity type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60081571A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0580833B2 (enrdf_load_stackoverflow
Inventor
Mitsuru Hanakura
満 花倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Meidensha Electric Manufacturing Co Ltd
Original Assignee
Meidensha Electric Manufacturing Co Ltd
Research Development Corp of Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meidensha Electric Manufacturing Co Ltd, Research Development Corp of Japan filed Critical Meidensha Electric Manufacturing Co Ltd
Priority to JP60081571A priority Critical patent/JPS61240681A/ja
Publication of JPS61240681A publication Critical patent/JPS61240681A/ja
Publication of JPH0580833B2 publication Critical patent/JPH0580833B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thyristors (AREA)
JP60081571A 1985-04-17 1985-04-17 半導体素子の製造方法 Granted JPS61240681A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60081571A JPS61240681A (ja) 1985-04-17 1985-04-17 半導体素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60081571A JPS61240681A (ja) 1985-04-17 1985-04-17 半導体素子の製造方法

Publications (2)

Publication Number Publication Date
JPS61240681A true JPS61240681A (ja) 1986-10-25
JPH0580833B2 JPH0580833B2 (enrdf_load_stackoverflow) 1993-11-10

Family

ID=13749987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60081571A Granted JPS61240681A (ja) 1985-04-17 1985-04-17 半導体素子の製造方法

Country Status (1)

Country Link
JP (1) JPS61240681A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0580833B2 (enrdf_load_stackoverflow) 1993-11-10

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