JPH0580591B2 - - Google Patents

Info

Publication number
JPH0580591B2
JPH0580591B2 JP59222125A JP22212584A JPH0580591B2 JP H0580591 B2 JPH0580591 B2 JP H0580591B2 JP 59222125 A JP59222125 A JP 59222125A JP 22212584 A JP22212584 A JP 22212584A JP H0580591 B2 JPH0580591 B2 JP H0580591B2
Authority
JP
Japan
Prior art keywords
leak
vacuum
exhaust
pressure
evacuation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59222125A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61101686A (ja
Inventor
Naotake Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59222125A priority Critical patent/JPS61101686A/ja
Publication of JPS61101686A publication Critical patent/JPS61101686A/ja
Publication of JPH0580591B2 publication Critical patent/JPH0580591B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP59222125A 1984-10-24 1984-10-24 真空排気装置 Granted JPS61101686A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59222125A JPS61101686A (ja) 1984-10-24 1984-10-24 真空排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59222125A JPS61101686A (ja) 1984-10-24 1984-10-24 真空排気装置

Publications (2)

Publication Number Publication Date
JPS61101686A JPS61101686A (ja) 1986-05-20
JPH0580591B2 true JPH0580591B2 (cs) 1993-11-09

Family

ID=16777551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59222125A Granted JPS61101686A (ja) 1984-10-24 1984-10-24 真空排気装置

Country Status (1)

Country Link
JP (1) JPS61101686A (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4776300B2 (ja) * 2005-08-10 2011-09-21 日本電子株式会社 ガス流量設定方法およびイオンビーム加工装置
CN110509906B (zh) * 2019-09-19 2024-04-02 深圳市大为创新科技股份有限公司 一种井下作业车用液力缓速器的控制系统
WO2021070338A1 (ja) * 2019-10-10 2021-04-15 株式会社日立ハイテク 荷電粒子線装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5941855U (ja) * 1982-09-01 1984-03-17 日本電子株式会社 電子顕微鏡等の鏡筒リ−ク装置
JPS59115553U (ja) * 1983-01-26 1984-08-04 日本電子株式会社 真空装置におけるガス導入装置
JPS60167192U (ja) * 1984-04-17 1985-11-06 日本電子株式会社 タ−ボ分子ポンプを用いた排気系

Also Published As

Publication number Publication date
JPS61101686A (ja) 1986-05-20

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term