JPH0578950B2 - - Google Patents

Info

Publication number
JPH0578950B2
JPH0578950B2 JP60293543A JP29354385A JPH0578950B2 JP H0578950 B2 JPH0578950 B2 JP H0578950B2 JP 60293543 A JP60293543 A JP 60293543A JP 29354385 A JP29354385 A JP 29354385A JP H0578950 B2 JPH0578950 B2 JP H0578950B2
Authority
JP
Japan
Prior art keywords
insulating film
film
electrode
forming
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60293543A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62156879A (ja
Inventor
Noboru Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP29354385A priority Critical patent/JPS62156879A/ja
Publication of JPS62156879A publication Critical patent/JPS62156879A/ja
Publication of JPH0578950B2 publication Critical patent/JPH0578950B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP29354385A 1985-12-28 1985-12-28 半導体圧力検知装置の製造方法 Granted JPS62156879A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29354385A JPS62156879A (ja) 1985-12-28 1985-12-28 半導体圧力検知装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29354385A JPS62156879A (ja) 1985-12-28 1985-12-28 半導体圧力検知装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62156879A JPS62156879A (ja) 1987-07-11
JPH0578950B2 true JPH0578950B2 (enrdf_load_stackoverflow) 1993-10-29

Family

ID=17796106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29354385A Granted JPS62156879A (ja) 1985-12-28 1985-12-28 半導体圧力検知装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62156879A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0750789B2 (ja) * 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法
JP3567094B2 (ja) 1999-02-09 2004-09-15 株式会社日立製作所 回路内蔵型センサおよびそれを用いた圧力検出装置
JP4710147B2 (ja) * 2000-06-13 2011-06-29 株式会社デンソー 半導体圧力センサ
JP5127210B2 (ja) * 2006-11-30 2013-01-23 株式会社日立製作所 Ｍｅｍｓセンサが混載された半導体装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029629A (ja) * 1983-07-27 1985-02-15 Yokogawa Hokushin Electric Corp 半導体容量形圧力センサ
JPS60138977A (ja) * 1983-12-27 1985-07-23 Fuji Electric Co Ltd 半導体形静電容量式圧力センサ

Also Published As

Publication number Publication date
JPS62156879A (ja) 1987-07-11

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