JPH057659B2 - - Google Patents

Info

Publication number
JPH057659B2
JPH057659B2 JP58244964A JP24496483A JPH057659B2 JP H057659 B2 JPH057659 B2 JP H057659B2 JP 58244964 A JP58244964 A JP 58244964A JP 24496483 A JP24496483 A JP 24496483A JP H057659 B2 JPH057659 B2 JP H057659B2
Authority
JP
Japan
Prior art keywords
thin film
heater
air space
sensor
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58244964A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60142268A (ja
Inventor
Jii Jonson Robaato
Ii Higashi Robaato
Jei Booree Fuiritsupu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP58244964A priority Critical patent/JPS60142268A/ja
Publication of JPS60142268A publication Critical patent/JPS60142268A/ja
Publication of JPH057659B2 publication Critical patent/JPH057659B2/ja
Granted legal-status Critical Current

Links

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  • Measuring Volume Flow (AREA)
JP58244964A 1983-12-27 1983-12-27 流速センサ Granted JPS60142268A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58244964A JPS60142268A (ja) 1983-12-27 1983-12-27 流速センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58244964A JPS60142268A (ja) 1983-12-27 1983-12-27 流速センサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1129640A Division JPH0795076B2 (ja) 1989-05-23 1989-05-23 流速センサ

Publications (2)

Publication Number Publication Date
JPS60142268A JPS60142268A (ja) 1985-07-27
JPH057659B2 true JPH057659B2 (enrdf_load_stackoverflow) 1993-01-29

Family

ID=17126571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58244964A Granted JPS60142268A (ja) 1983-12-27 1983-12-27 流速センサ

Country Status (1)

Country Link
JP (1) JPS60142268A (enrdf_load_stackoverflow)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6752014B1 (en) 1999-09-24 2004-06-22 Hitachi, Ltd. Hot-wire type air flow meter for internal combustion engine
DE19739949B4 (de) * 1997-04-17 2005-07-14 Mitsubishi Denki K.K. Durchflußdetektor
DE19945168B4 (de) * 1999-04-13 2006-05-18 Mitsubishi Denki K.K. Thermoempfindlicher Flussratensensor und Herstellungsverfahren dafür
DE19961129B4 (de) * 1999-07-14 2006-07-06 Mitsubishi Denki K.K. Flusssensor eines thermischen Typs
DE10215954B4 (de) * 2001-08-22 2006-08-10 Mitsubishi Denki K.K. Durchflussmessvorrichtung
JP2008233057A (ja) * 2006-08-21 2008-10-02 Mitsuteru Kimura 熱伝導型センサとこれを用いた熱伝導型計測装置
JP2011099757A (ja) * 2009-11-06 2011-05-19 Hitachi Automotive Systems Ltd 熱式流体流量センサおよびその製造方法
WO2015076117A1 (ja) * 2013-11-20 2015-05-28 株式会社村田製作所 熱式流量センサ
US10989579B2 (en) 2018-02-23 2021-04-27 Mitsubishi Electric Corporation Thermal detection sensor

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1236931A (en) * 1984-07-25 1988-05-17 Philip J. Bohrer Semiconductor device structure and processing by means of preferential etch undercutting
JPS63282662A (ja) * 1987-03-05 1988-11-18 Yamatake Honeywell Co Ltd 流速センサ
JPH0643906B2 (ja) * 1988-10-17 1994-06-08 山武ハネウエル株式会社 フローセンサ
JPH0795076B2 (ja) * 1989-05-23 1995-10-11 山武ハネウエル株式会社 流速センサ
JPH047684A (ja) * 1990-04-25 1992-01-13 Shimadzu Corp データ表示方式
JPH077008B2 (ja) * 1990-05-07 1995-01-30 山武ハネウエル株式会社 流速センサ
JPH0466578U (enrdf_load_stackoverflow) * 1990-10-19 1992-06-11
JP2666163B2 (ja) * 1991-12-04 1997-10-22 山武ハネウエル株式会社 流速センサの温度特性補正方法
US5763775A (en) * 1996-03-13 1998-06-09 Ricoh Company, Ltd. Flow sensor having first and second temperature detecting portions for accurate measuring of a flow rate and a manufacturing method thereof
JP3366818B2 (ja) * 1997-01-16 2003-01-14 株式会社日立製作所 熱式空気流量計
JP3333712B2 (ja) * 1997-06-19 2002-10-15 三菱電機株式会社 流量検出素子およびそれを用いた流量センサ
JP3981907B2 (ja) 1998-10-21 2007-09-26 株式会社デンソー 流量測定装置
JP4980510B2 (ja) * 2000-07-12 2012-07-18 株式会社リコー フローセンサ及び複合型流量計
JP4474771B2 (ja) 2000-12-20 2010-06-09 株式会社デンソー 流量測定装置
US6935172B2 (en) 2001-08-14 2005-08-30 Hitachi, Ltd. Thermal type flow measuring device
JP5526065B2 (ja) 2011-03-25 2014-06-18 日立オートモティブシステムズ株式会社 熱式センサおよびその製造方法
JP6561017B2 (ja) 2016-06-15 2019-08-14 日立オートモティブシステムズ株式会社 半導体装置、半導体装置の製造方法および流量センサ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5618381A (en) * 1979-07-25 1981-02-21 Ricoh Kk Electric heater

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19739949B4 (de) * 1997-04-17 2005-07-14 Mitsubishi Denki K.K. Durchflußdetektor
DE19945168B4 (de) * 1999-04-13 2006-05-18 Mitsubishi Denki K.K. Thermoempfindlicher Flussratensensor und Herstellungsverfahren dafür
DE19961129B4 (de) * 1999-07-14 2006-07-06 Mitsubishi Denki K.K. Flusssensor eines thermischen Typs
US6752014B1 (en) 1999-09-24 2004-06-22 Hitachi, Ltd. Hot-wire type air flow meter for internal combustion engine
DE10215954B4 (de) * 2001-08-22 2006-08-10 Mitsubishi Denki K.K. Durchflussmessvorrichtung
JP2008233057A (ja) * 2006-08-21 2008-10-02 Mitsuteru Kimura 熱伝導型センサとこれを用いた熱伝導型計測装置
JP2011099757A (ja) * 2009-11-06 2011-05-19 Hitachi Automotive Systems Ltd 熱式流体流量センサおよびその製造方法
WO2015076117A1 (ja) * 2013-11-20 2015-05-28 株式会社村田製作所 熱式流量センサ
JPWO2015076117A1 (ja) * 2013-11-20 2017-03-16 株式会社村田製作所 熱式流量センサ
US9970802B2 (en) 2013-11-20 2018-05-15 Murata Manufacturing Co., Ltd. Thermal-type flow-rate sensor
US10989579B2 (en) 2018-02-23 2021-04-27 Mitsubishi Electric Corporation Thermal detection sensor

Also Published As

Publication number Publication date
JPS60142268A (ja) 1985-07-27

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Legal Events

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EXPY Cancellation because of completion of term