JPH0576204B2 - - Google Patents

Info

Publication number
JPH0576204B2
JPH0576204B2 JP58244496A JP24449683A JPH0576204B2 JP H0576204 B2 JPH0576204 B2 JP H0576204B2 JP 58244496 A JP58244496 A JP 58244496A JP 24449683 A JP24449683 A JP 24449683A JP H0576204 B2 JPH0576204 B2 JP H0576204B2
Authority
JP
Japan
Prior art keywords
switch
amplifier
deflection
current
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP58244496A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60139007A (ja
Inventor
Masahide Okumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58244496A priority Critical patent/JPS60139007A/ja
Publication of JPS60139007A publication Critical patent/JPS60139007A/ja
Publication of JPH0576204B2 publication Critical patent/JPH0576204B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Amplifiers (AREA)
JP58244496A 1983-12-27 1983-12-27 電子線描画装置 Granted JPS60139007A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58244496A JPS60139007A (ja) 1983-12-27 1983-12-27 電子線描画装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58244496A JPS60139007A (ja) 1983-12-27 1983-12-27 電子線描画装置

Publications (2)

Publication Number Publication Date
JPS60139007A JPS60139007A (ja) 1985-07-23
JPH0576204B2 true JPH0576204B2 (OSRAM) 1993-10-22

Family

ID=17119527

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58244496A Granted JPS60139007A (ja) 1983-12-27 1983-12-27 電子線描画装置

Country Status (1)

Country Link
JP (1) JPS60139007A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004111262A (ja) 2002-09-19 2004-04-08 Nec Yamagata Ltd ガンマ補正回路およびガンマ補正回路を備えたパネル駆動装置
JP2007141781A (ja) * 2005-11-22 2007-06-07 Hitachi High-Technologies Corp 電磁偏向回路を有する走査電子線装置
JP6054708B2 (ja) * 2012-11-05 2016-12-27 日本電子株式会社 荷電粒子ビームの偏向装置及びそれを備えた荷電粒子ビーム装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539617Y2 (OSRAM) * 1976-02-17 1980-09-17
JPS5769322U (OSRAM) * 1980-10-15 1982-04-26

Also Published As

Publication number Publication date
JPS60139007A (ja) 1985-07-23

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees