JPH0575965B2 - - Google Patents

Info

Publication number
JPH0575965B2
JPH0575965B2 JP1161055A JP16105589A JPH0575965B2 JP H0575965 B2 JPH0575965 B2 JP H0575965B2 JP 1161055 A JP1161055 A JP 1161055A JP 16105589 A JP16105589 A JP 16105589A JP H0575965 B2 JPH0575965 B2 JP H0575965B2
Authority
JP
Japan
Prior art keywords
pattern
edge
amount
edge position
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1161055A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0325304A (ja
Inventor
Toshiro Matsubara
Masaki Inoe
Tetsuo Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP16105589A priority Critical patent/JPH0325304A/ja
Publication of JPH0325304A publication Critical patent/JPH0325304A/ja
Publication of JPH0575965B2 publication Critical patent/JPH0575965B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP16105589A 1989-06-23 1989-06-23 パターン位置合わせ方法 Granted JPH0325304A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16105589A JPH0325304A (ja) 1989-06-23 1989-06-23 パターン位置合わせ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16105589A JPH0325304A (ja) 1989-06-23 1989-06-23 パターン位置合わせ方法

Publications (2)

Publication Number Publication Date
JPH0325304A JPH0325304A (ja) 1991-02-04
JPH0575965B2 true JPH0575965B2 (en:Method) 1993-10-21

Family

ID=15727757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16105589A Granted JPH0325304A (ja) 1989-06-23 1989-06-23 パターン位置合わせ方法

Country Status (1)

Country Link
JP (1) JPH0325304A (en:Method)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3148539B2 (ja) * 1994-11-30 2001-03-19 大日本スクリーン製造株式会社 パターン欠陥検査装置
US6621566B1 (en) * 2000-10-02 2003-09-16 Teradyne, Inc. Optical inspection system having integrated component learning
JP5615252B2 (ja) * 2011-12-02 2014-10-29 株式会社トプコン 外観検査装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0612249B2 (ja) * 1985-05-27 1994-02-16 株式会社ニコン パタ−ン検査装置

Also Published As

Publication number Publication date
JPH0325304A (ja) 1991-02-04

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