JPH0325304A - パターン位置合わせ方法 - Google Patents

パターン位置合わせ方法

Info

Publication number
JPH0325304A
JPH0325304A JP16105589A JP16105589A JPH0325304A JP H0325304 A JPH0325304 A JP H0325304A JP 16105589 A JP16105589 A JP 16105589A JP 16105589 A JP16105589 A JP 16105589A JP H0325304 A JPH0325304 A JP H0325304A
Authority
JP
Japan
Prior art keywords
pattern
edge
positional deviation
amount
edge position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16105589A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0575965B2 (en:Method
Inventor
Toshiro Matsubara
松原　俊郎
Masaki Inoue
井上　雅基
Tetsuo Kobayashi
哲郎 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP16105589A priority Critical patent/JPH0325304A/ja
Publication of JPH0325304A publication Critical patent/JPH0325304A/ja
Publication of JPH0575965B2 publication Critical patent/JPH0575965B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP16105589A 1989-06-23 1989-06-23 パターン位置合わせ方法 Granted JPH0325304A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16105589A JPH0325304A (ja) 1989-06-23 1989-06-23 パターン位置合わせ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16105589A JPH0325304A (ja) 1989-06-23 1989-06-23 パターン位置合わせ方法

Publications (2)

Publication Number Publication Date
JPH0325304A true JPH0325304A (ja) 1991-02-04
JPH0575965B2 JPH0575965B2 (en:Method) 1993-10-21

Family

ID=15727757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16105589A Granted JPH0325304A (ja) 1989-06-23 1989-06-23 パターン位置合わせ方法

Country Status (1)

Country Link
JP (1) JPH0325304A (en:Method)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08152309A (ja) * 1994-11-30 1996-06-11 Dainippon Screen Mfg Co Ltd パターン欠陥検査装置
JP2004510975A (ja) * 2000-10-02 2004-04-08 テラダイン・インコーポレーテッド 素子学習を統合した光学検査システム
JP2013117414A (ja) * 2011-12-02 2013-06-13 Topcon Corp 外観検査装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61271831A (ja) * 1985-05-27 1986-12-02 Nippon Kogaku Kk <Nikon> パタ−ン検査装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61271831A (ja) * 1985-05-27 1986-12-02 Nippon Kogaku Kk <Nikon> パタ−ン検査装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08152309A (ja) * 1994-11-30 1996-06-11 Dainippon Screen Mfg Co Ltd パターン欠陥検査装置
JP2004510975A (ja) * 2000-10-02 2004-04-08 テラダイン・インコーポレーテッド 素子学習を統合した光学検査システム
JP2013117414A (ja) * 2011-12-02 2013-06-13 Topcon Corp 外観検査装置

Also Published As

Publication number Publication date
JPH0575965B2 (en:Method) 1993-10-21

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