JPH057466B2 - - Google Patents

Info

Publication number
JPH057466B2
JPH057466B2 JP58127242A JP12724283A JPH057466B2 JP H057466 B2 JPH057466 B2 JP H057466B2 JP 58127242 A JP58127242 A JP 58127242A JP 12724283 A JP12724283 A JP 12724283A JP H057466 B2 JPH057466 B2 JP H057466B2
Authority
JP
Japan
Prior art keywords
abrasive
caustic soda
aqueous solution
supply tank
soda aqueous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58127242A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6021386A (ja
Inventor
Seiji Kurihara
Masaharu Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Toshiba Corp
Original Assignee
Toshiba Corp
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Ceramics Co Ltd filed Critical Toshiba Corp
Priority to JP12724283A priority Critical patent/JPS6021386A/ja
Publication of JPS6021386A publication Critical patent/JPS6021386A/ja
Publication of JPH057466B2 publication Critical patent/JPH057466B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • ing And Chemical Polishing (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP12724283A 1983-07-13 1983-07-13 ポリシング用研摩剤供給装置 Granted JPS6021386A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12724283A JPS6021386A (ja) 1983-07-13 1983-07-13 ポリシング用研摩剤供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12724283A JPS6021386A (ja) 1983-07-13 1983-07-13 ポリシング用研摩剤供給装置

Publications (2)

Publication Number Publication Date
JPS6021386A JPS6021386A (ja) 1985-02-02
JPH057466B2 true JPH057466B2 (enExample) 1993-01-28

Family

ID=14955223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12724283A Granted JPS6021386A (ja) 1983-07-13 1983-07-13 ポリシング用研摩剤供給装置

Country Status (1)

Country Link
JP (1) JPS6021386A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100475015B1 (ko) * 1997-11-10 2005-04-14 삼성전자주식회사 슬러리공급장치를포함하는반도체장치제조용화학적기계적연마설비

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5944656B2 (ja) * 1978-08-09 1984-10-31 日立電子株式会社 デイジタル微分解析機の積分方式
JPS5654390A (en) * 1979-10-11 1981-05-14 Tokyo Shibaura Electric Co Feedwater nozzle

Also Published As

Publication number Publication date
JPS6021386A (ja) 1985-02-02

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