JPS6021386A - ポリシング用研摩剤供給装置 - Google Patents

ポリシング用研摩剤供給装置

Info

Publication number
JPS6021386A
JPS6021386A JP12724283A JP12724283A JPS6021386A JP S6021386 A JPS6021386 A JP S6021386A JP 12724283 A JP12724283 A JP 12724283A JP 12724283 A JP12724283 A JP 12724283A JP S6021386 A JPS6021386 A JP S6021386A
Authority
JP
Japan
Prior art keywords
abrasive
caustic soda
supplying
supply
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12724283A
Other languages
English (en)
Japanese (ja)
Other versions
JPH057466B2 (enExample
Inventor
Seiji Kurihara
栗原　誠司
Masaharu Kinoshita
正治 木下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Toshiba Corp
Original Assignee
Toshiba Corp
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Ceramics Co Ltd filed Critical Toshiba Corp
Priority to JP12724283A priority Critical patent/JPS6021386A/ja
Publication of JPS6021386A publication Critical patent/JPS6021386A/ja
Publication of JPH057466B2 publication Critical patent/JPH057466B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • ing And Chemical Polishing (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP12724283A 1983-07-13 1983-07-13 ポリシング用研摩剤供給装置 Granted JPS6021386A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12724283A JPS6021386A (ja) 1983-07-13 1983-07-13 ポリシング用研摩剤供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12724283A JPS6021386A (ja) 1983-07-13 1983-07-13 ポリシング用研摩剤供給装置

Publications (2)

Publication Number Publication Date
JPS6021386A true JPS6021386A (ja) 1985-02-02
JPH057466B2 JPH057466B2 (enExample) 1993-01-28

Family

ID=14955223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12724283A Granted JPS6021386A (ja) 1983-07-13 1983-07-13 ポリシング用研摩剤供給装置

Country Status (1)

Country Link
JP (1) JPS6021386A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100475015B1 (ko) * 1997-11-10 2005-04-14 삼성전자주식회사 슬러리공급장치를포함하는반도체장치제조용화학적기계적연마설비

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539902A (en) * 1978-08-09 1980-03-21 Hitachi Denshi Ltd Integrating system of digital differential analyzer
JPS5654390A (en) * 1979-10-11 1981-05-14 Tokyo Shibaura Electric Co Feedwater nozzle

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539902A (en) * 1978-08-09 1980-03-21 Hitachi Denshi Ltd Integrating system of digital differential analyzer
JPS5654390A (en) * 1979-10-11 1981-05-14 Tokyo Shibaura Electric Co Feedwater nozzle

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100475015B1 (ko) * 1997-11-10 2005-04-14 삼성전자주식회사 슬러리공급장치를포함하는반도체장치제조용화학적기계적연마설비

Also Published As

Publication number Publication date
JPH057466B2 (enExample) 1993-01-28

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