JPH0571129B2 - - Google Patents

Info

Publication number
JPH0571129B2
JPH0571129B2 JP60000162A JP16285A JPH0571129B2 JP H0571129 B2 JPH0571129 B2 JP H0571129B2 JP 60000162 A JP60000162 A JP 60000162A JP 16285 A JP16285 A JP 16285A JP H0571129 B2 JPH0571129 B2 JP H0571129B2
Authority
JP
Japan
Prior art keywords
mask material
etching
groove
silicon
layer mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60000162A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61159737A (ja
Inventor
Masakatsu Kimizuka
Toshitaka Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP60000162A priority Critical patent/JPS61159737A/ja
Publication of JPS61159737A publication Critical patent/JPS61159737A/ja
Publication of JPH0571129B2 publication Critical patent/JPH0571129B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/691—

Landscapes

  • Drying Of Semiconductors (AREA)
  • Element Separation (AREA)
JP60000162A 1985-01-07 1985-01-07 半導体装置の製造方法 Granted JPS61159737A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60000162A JPS61159737A (ja) 1985-01-07 1985-01-07 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60000162A JPS61159737A (ja) 1985-01-07 1985-01-07 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61159737A JPS61159737A (ja) 1986-07-19
JPH0571129B2 true JPH0571129B2 (enExample) 1993-10-06

Family

ID=11466340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60000162A Granted JPS61159737A (ja) 1985-01-07 1985-01-07 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61159737A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4361620A1 (en) 2022-10-28 2024-05-01 ARKRAY, Inc. Method for analyzing sample comprising hemoglobin a2 by capillary electrophoresis

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0694959A3 (en) * 1989-07-03 1997-12-29 AT&T Corp. Trench etching in an integrated-circuit semiconductor device
JPH07326659A (ja) 1994-06-02 1995-12-12 Hitachi Ltd 半導体集積回路装置の製造方法
JP7328276B2 (ja) 2021-05-27 2023-08-16 京セラ株式会社 非相反性導波路、アイソレータ、光スイッチ、光送受信機、データセンタ、及び製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4361620A1 (en) 2022-10-28 2024-05-01 ARKRAY, Inc. Method for analyzing sample comprising hemoglobin a2 by capillary electrophoresis

Also Published As

Publication number Publication date
JPS61159737A (ja) 1986-07-19

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term