JPH0570824B2 - - Google Patents
Info
- Publication number
- JPH0570824B2 JPH0570824B2 JP21167084A JP21167084A JPH0570824B2 JP H0570824 B2 JPH0570824 B2 JP H0570824B2 JP 21167084 A JP21167084 A JP 21167084A JP 21167084 A JP21167084 A JP 21167084A JP H0570824 B2 JPH0570824 B2 JP H0570824B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- electrode
- amorphous silicon
- source
- crystal drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 claims description 27
- 239000004973 liquid crystal related substance Substances 0.000 claims description 27
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 16
- 239000011159 matrix material Substances 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 239000010410 layer Substances 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 12
- 229910052804 chromium Inorganic materials 0.000 description 11
- 239000011651 chromium Substances 0.000 description 11
- 239000000758 substrate Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000010406 interfacial reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21167084A JPS6190193A (ja) | 1984-10-09 | 1984-10-09 | アクテイブマトリクス液晶表示装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21167084A JPS6190193A (ja) | 1984-10-09 | 1984-10-09 | アクテイブマトリクス液晶表示装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6190193A JPS6190193A (ja) | 1986-05-08 |
| JPH0570824B2 true JPH0570824B2 (enrdf_load_stackoverflow) | 1993-10-05 |
Family
ID=16609645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21167084A Granted JPS6190193A (ja) | 1984-10-09 | 1984-10-09 | アクテイブマトリクス液晶表示装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6190193A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH073872B2 (ja) * | 1986-06-30 | 1995-01-18 | キヤノン株式会社 | 薄膜トランジスタを用いた半導体装置の製造方法 |
| US5648663A (en) * | 1985-08-05 | 1997-07-15 | Canon Kabushiki Kaisha | Semiconductor structure having transistor and other elements on a common substrate and process for producing the same |
| JP2663418B2 (ja) * | 1986-06-30 | 1997-10-15 | キヤノン株式会社 | 薄膜トランジスタの製造方法 |
-
1984
- 1984-10-09 JP JP21167084A patent/JPS6190193A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6190193A (ja) | 1986-05-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |