JPH0570773B2 - - Google Patents

Info

Publication number
JPH0570773B2
JPH0570773B2 JP60111733A JP11173385A JPH0570773B2 JP H0570773 B2 JPH0570773 B2 JP H0570773B2 JP 60111733 A JP60111733 A JP 60111733A JP 11173385 A JP11173385 A JP 11173385A JP H0570773 B2 JPH0570773 B2 JP H0570773B2
Authority
JP
Japan
Prior art keywords
plating layer
metal substrate
diaphragm
peripheral fixing
fixing part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60111733A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61269033A (ja
Inventor
Kenichi Sugimoto
Tamotsu Baba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai Rika Co Ltd
Original Assignee
Tokai Rika Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai Rika Co Ltd filed Critical Tokai Rika Co Ltd
Priority to JP11173385A priority Critical patent/JPS61269033A/ja
Publication of JPS61269033A publication Critical patent/JPS61269033A/ja
Publication of JPH0570773B2 publication Critical patent/JPH0570773B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
JP11173385A 1985-05-23 1985-05-23 ダイヤフラム Granted JPS61269033A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11173385A JPS61269033A (ja) 1985-05-23 1985-05-23 ダイヤフラム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11173385A JPS61269033A (ja) 1985-05-23 1985-05-23 ダイヤフラム

Publications (2)

Publication Number Publication Date
JPS61269033A JPS61269033A (ja) 1986-11-28
JPH0570773B2 true JPH0570773B2 (https=) 1993-10-05

Family

ID=14568797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11173385A Granted JPS61269033A (ja) 1985-05-23 1985-05-23 ダイヤフラム

Country Status (1)

Country Link
JP (1) JPS61269033A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19736306C5 (de) * 1996-08-27 2010-02-25 Robert Bosch Gmbh Verfahren zur Herstellung von Drucksensoren

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5758367A (en) * 1980-09-24 1982-04-08 Matsushita Electric Ind Co Ltd Manufacture of pressure sensor

Also Published As

Publication number Publication date
JPS61269033A (ja) 1986-11-28

Similar Documents

Publication Publication Date Title
US20030016116A1 (en) Method of depositing a thin metallic film and related apparatus
JPH0313304B2 (https=)
US5310610A (en) Silicon micro sensor and manufacturing method therefor
JPH0570773B2 (https=)
JPS6139344A (ja) シャドウマスク
JPS6376859A (ja) 蒸着用マスクとその製造法
EP0341964A2 (en) Silicon micro sensor and manufacturing method therefor
JP3333561B2 (ja) 凹版印刷版
JP3077918B2 (ja) エッチング方法
JPH03276003A (ja) ひずみゲージとその製造方法
US3708863A (en) Method of making a temperature sensing element
JPS5819470A (ja) マスク蒸着方法
JPH06221945A (ja) 半導体圧力センサおよびその製造方法
JP3076954B2 (ja) ダイヤモンドブリッジまたはダイヤモンドカンチレバーとその製造方法並びに該ダイヤモンドブリッジまたはダイヤモンドカンチレバーを使用した電子デバイス
JPH0823059A (ja) リードフレームの製造方法及びその方法に適した異種金属積層材料のエッチング方法
JP3349001B2 (ja) 金属膜の形成方法
JP2559768B2 (ja) クロム膜のテーパーエッチング方法
JPS5921199B2 (ja) 樹脂フィルム基板の製造方法
JPH0524384B2 (https=)
JPH0775124B2 (ja) 薄膜の堆積方法
JPH0310130A (ja) 温度センサの製造方法
JPH0231470A (ja) 半導体圧力変換器の製造方法
JPH02280325A (ja) 半導体装置の製造方法
JPH0368175A (ja) 半導体圧力センサ
JPH0233974A (ja) 圧力変換素子の製造方法