JPH0566913B2 - - Google Patents
Info
- Publication number
- JPH0566913B2 JPH0566913B2 JP18792187A JP18792187A JPH0566913B2 JP H0566913 B2 JPH0566913 B2 JP H0566913B2 JP 18792187 A JP18792187 A JP 18792187A JP 18792187 A JP18792187 A JP 18792187A JP H0566913 B2 JPH0566913 B2 JP H0566913B2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- susceptor
- single crystal
- crystal growth
- bottom wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 claims description 31
- 239000002994 raw material Substances 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 description 9
- 239000000155 melt Substances 0.000 description 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- 238000002425 crystallisation Methods 0.000 description 4
- 230000008025 crystallization Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000008710 crystal-8 Substances 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18792187A JPS6433095A (en) | 1987-07-28 | 1987-07-28 | Single crystal growth apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18792187A JPS6433095A (en) | 1987-07-28 | 1987-07-28 | Single crystal growth apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6433095A JPS6433095A (en) | 1989-02-02 |
| JPH0566913B2 true JPH0566913B2 (enrdf_load_stackoverflow) | 1993-09-22 |
Family
ID=16214534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18792187A Granted JPS6433095A (en) | 1987-07-28 | 1987-07-28 | Single crystal growth apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6433095A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118308779B (zh) * | 2024-06-11 | 2024-09-10 | 北京镓创科技有限公司 | 氧化镓单晶及其生长装置及生长方法 |
-
1987
- 1987-07-28 JP JP18792187A patent/JPS6433095A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6433095A (en) | 1989-02-02 |
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