JPH0565082B2 - - Google Patents

Info

Publication number
JPH0565082B2
JPH0565082B2 JP7813887A JP7813887A JPH0565082B2 JP H0565082 B2 JPH0565082 B2 JP H0565082B2 JP 7813887 A JP7813887 A JP 7813887A JP 7813887 A JP7813887 A JP 7813887A JP H0565082 B2 JPH0565082 B2 JP H0565082B2
Authority
JP
Japan
Prior art keywords
flatness
measured
glossiness
image
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7813887A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63243711A (ja
Inventor
Yukio Kano
Kunyuki Yoshikawa
Takaaki Kishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai Rika Co Ltd
Original Assignee
Tokai Rika Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai Rika Co Ltd filed Critical Tokai Rika Co Ltd
Priority to JP7813887A priority Critical patent/JPS63243711A/ja
Publication of JPS63243711A publication Critical patent/JPS63243711A/ja
Publication of JPH0565082B2 publication Critical patent/JPH0565082B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP7813887A 1987-03-31 1987-03-31 表面性状測定装置 Granted JPS63243711A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7813887A JPS63243711A (ja) 1987-03-31 1987-03-31 表面性状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7813887A JPS63243711A (ja) 1987-03-31 1987-03-31 表面性状測定装置

Publications (2)

Publication Number Publication Date
JPS63243711A JPS63243711A (ja) 1988-10-11
JPH0565082B2 true JPH0565082B2 (enrdf_load_stackoverflow) 1993-09-17

Family

ID=13653518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7813887A Granted JPS63243711A (ja) 1987-03-31 1987-03-31 表面性状測定装置

Country Status (1)

Country Link
JP (1) JPS63243711A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS63243711A (ja) 1988-10-11

Similar Documents

Publication Publication Date Title
US5040059A (en) Method and apparatus of image mensuration with selectively visible and invisible reseau grid marks
US6509973B2 (en) Apparatus for measuring three-dimensional shape
US5090811A (en) Optical radius gauge
JPH0315124B2 (enrdf_load_stackoverflow)
JP3715377B2 (ja) 物体形状測定装置
US4557602A (en) Edge detector in optical measuring instrument
JPH0915151A (ja) 拡散特性測定装置
JP2003014430A (ja) 3次元測定方法および3次元測定装置
JPS60237347A (ja) 異物検査装置
JPH0565082B2 (enrdf_load_stackoverflow)
JPS63100309A (ja) 平坦度測定装置
JPH0350752A (ja) ウェハアライメント方法、及びその装置
JPH07190735A (ja) 光学式測定装置およびその測定方法
JP3319666B2 (ja) エッジ検出装置
JPS62176359A (ja) 透過原稿画像読取装置
JPS63109309A (ja) 非接触式平坦度測定装置
JPS63243841A (ja) 表面性状測定機
JPH0789058B2 (ja) 距離測定装置
JPS63128213A (ja) 光学測定機
JPH0131124B2 (enrdf_load_stackoverflow)
JPS5836052Y2 (ja) レンズの曲率測定装置
JPH03199946A (ja) 透視歪の測定方法及びその装置
JP3209886B2 (ja) 計測装置
JP2001296242A (ja) 光学的測定装置
JPH07122571B2 (ja) 折曲げ加工機用ワーク傾斜角度測定装置