JPS63243711A - 表面性状測定装置 - Google Patents

表面性状測定装置

Info

Publication number
JPS63243711A
JPS63243711A JP7813887A JP7813887A JPS63243711A JP S63243711 A JPS63243711 A JP S63243711A JP 7813887 A JP7813887 A JP 7813887A JP 7813887 A JP7813887 A JP 7813887A JP S63243711 A JPS63243711 A JP S63243711A
Authority
JP
Japan
Prior art keywords
flatness
glossiness
measured
image
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7813887A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0565082B2 (enrdf_load_stackoverflow
Inventor
Yukio Kano
幸雄 狩野
Kuniyuki Yoshikawa
吉川　邦幸
Takaaki Kishida
岸田　任晤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai Rika Co Ltd
Original Assignee
Tokai Rika Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai Rika Co Ltd filed Critical Tokai Rika Co Ltd
Priority to JP7813887A priority Critical patent/JPS63243711A/ja
Publication of JPS63243711A publication Critical patent/JPS63243711A/ja
Publication of JPH0565082B2 publication Critical patent/JPH0565082B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP7813887A 1987-03-31 1987-03-31 表面性状測定装置 Granted JPS63243711A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7813887A JPS63243711A (ja) 1987-03-31 1987-03-31 表面性状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7813887A JPS63243711A (ja) 1987-03-31 1987-03-31 表面性状測定装置

Publications (2)

Publication Number Publication Date
JPS63243711A true JPS63243711A (ja) 1988-10-11
JPH0565082B2 JPH0565082B2 (enrdf_load_stackoverflow) 1993-09-17

Family

ID=13653518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7813887A Granted JPS63243711A (ja) 1987-03-31 1987-03-31 表面性状測定装置

Country Status (1)

Country Link
JP (1) JPS63243711A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0565082B2 (enrdf_load_stackoverflow) 1993-09-17

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