JPH056334B2 - - Google Patents
Info
- Publication number
- JPH056334B2 JPH056334B2 JP20803683A JP20803683A JPH056334B2 JP H056334 B2 JPH056334 B2 JP H056334B2 JP 20803683 A JP20803683 A JP 20803683A JP 20803683 A JP20803683 A JP 20803683A JP H056334 B2 JPH056334 B2 JP H056334B2
- Authority
- JP
- Japan
- Prior art keywords
- alloy
- composite target
- sputtering
- magnetic thin
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002131 composite material Substances 0.000 claims description 14
- 229910001152 Bi alloy Inorganic materials 0.000 claims description 11
- 229910000808 amorphous metal alloy Inorganic materials 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- 238000004544 sputter deposition Methods 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000002844 melting Methods 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000010287 polarization Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 230000005374 Kerr effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20803683A JPS60100418A (ja) | 1983-11-04 | 1983-11-04 | 磁性薄膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20803683A JPS60100418A (ja) | 1983-11-04 | 1983-11-04 | 磁性薄膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60100418A JPS60100418A (ja) | 1985-06-04 |
| JPH056334B2 true JPH056334B2 (enrdf_load_stackoverflow) | 1993-01-26 |
Family
ID=16549590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20803683A Granted JPS60100418A (ja) | 1983-11-04 | 1983-11-04 | 磁性薄膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60100418A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6118107A (ja) * | 1984-07-04 | 1986-01-27 | Ricoh Co Ltd | 非晶質磁気光学層 |
| JP5162883B2 (ja) * | 2005-11-24 | 2013-03-13 | 株式会社リコー | 光記録媒体の記録層製膜用スパッタリングターゲット及びその製造方法、並びに光記録媒体の製造方法 |
-
1983
- 1983-11-04 JP JP20803683A patent/JPS60100418A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60100418A (ja) | 1985-06-04 |
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