JPH0562818B2 - - Google Patents

Info

Publication number
JPH0562818B2
JPH0562818B2 JP18628985A JP18628985A JPH0562818B2 JP H0562818 B2 JPH0562818 B2 JP H0562818B2 JP 18628985 A JP18628985 A JP 18628985A JP 18628985 A JP18628985 A JP 18628985A JP H0562818 B2 JPH0562818 B2 JP H0562818B2
Authority
JP
Japan
Prior art keywords
metal layer
etching
wafer
electrode
current value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP18628985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6246530A (ja
Inventor
Masato Moriwake
Yasuhisa Oomachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP18628985A priority Critical patent/JPS6246530A/ja
Publication of JPS6246530A publication Critical patent/JPS6246530A/ja
Publication of JPH0562818B2 publication Critical patent/JPH0562818B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP18628985A 1985-08-23 1985-08-23 金属層のエツチング終点の検出方法 Granted JPS6246530A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18628985A JPS6246530A (ja) 1985-08-23 1985-08-23 金属層のエツチング終点の検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18628985A JPS6246530A (ja) 1985-08-23 1985-08-23 金属層のエツチング終点の検出方法

Publications (2)

Publication Number Publication Date
JPS6246530A JPS6246530A (ja) 1987-02-28
JPH0562818B2 true JPH0562818B2 (enrdf_load_stackoverflow) 1993-09-09

Family

ID=16185703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18628985A Granted JPS6246530A (ja) 1985-08-23 1985-08-23 金属層のエツチング終点の検出方法

Country Status (1)

Country Link
JP (1) JPS6246530A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0175012B1 (ko) * 1995-09-13 1999-02-18 김광호 초경강판재의 패턴 형성 방법
JP2020136332A (ja) * 2019-02-14 2020-08-31 株式会社ディスコ エッチング方法
CN110148568A (zh) * 2019-05-07 2019-08-20 深圳市华星光电技术有限公司 薄膜晶体管基板金属层的金属蚀刻终点测定方法

Also Published As

Publication number Publication date
JPS6246530A (ja) 1987-02-28

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