JPH0560257B2 - - Google Patents
Info
- Publication number
- JPH0560257B2 JPH0560257B2 JP59186732A JP18673284A JPH0560257B2 JP H0560257 B2 JPH0560257 B2 JP H0560257B2 JP 59186732 A JP59186732 A JP 59186732A JP 18673284 A JP18673284 A JP 18673284A JP H0560257 B2 JPH0560257 B2 JP H0560257B2
- Authority
- JP
- Japan
- Prior art keywords
- copper
- photoresist
- thin film
- inductor
- electrolytic plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Weting (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59186732A JPS6164140A (ja) | 1984-09-06 | 1984-09-06 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59186732A JPS6164140A (ja) | 1984-09-06 | 1984-09-06 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6164140A JPS6164140A (ja) | 1986-04-02 |
| JPH0560257B2 true JPH0560257B2 (enrdf_load_stackoverflow) | 1993-09-01 |
Family
ID=16193670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59186732A Granted JPS6164140A (ja) | 1984-09-06 | 1984-09-06 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6164140A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH065785A (ja) * | 1992-06-24 | 1994-01-14 | Nec Corp | スパイラルインダクタの製造方法 |
| JP5013131B2 (ja) * | 2009-02-13 | 2012-08-29 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
-
1984
- 1984-09-06 JP JP59186732A patent/JPS6164140A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6164140A (ja) | 1986-04-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |