JPH0559877B2 - - Google Patents
Info
- Publication number
- JPH0559877B2 JPH0559877B2 JP62240361A JP24036187A JPH0559877B2 JP H0559877 B2 JPH0559877 B2 JP H0559877B2 JP 62240361 A JP62240361 A JP 62240361A JP 24036187 A JP24036187 A JP 24036187A JP H0559877 B2 JPH0559877 B2 JP H0559877B2
- Authority
- JP
- Japan
- Prior art keywords
- melt
- crystal
- chamber
- diameter
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 claims description 73
- 239000000155 melt Substances 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 9
- 238000005259 measurement Methods 0.000 description 10
- 238000005520 cutting process Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004033 diameter control Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62240361A JPS6483595A (en) | 1987-09-25 | 1987-09-25 | Device for measuring crystal diameter |
| US07/249,004 US4926357A (en) | 1987-09-25 | 1988-09-23 | Apparatus for measuring diameter of crystal |
| DE8888710031T DE3876384T2 (de) | 1987-09-25 | 1988-09-26 | Vorrichtung zum messen des durchmessers eines kristalles. |
| EP88710031A EP0315572B1 (en) | 1987-09-25 | 1988-09-26 | Apparatus for measuring the diameter of a crystal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62240361A JPS6483595A (en) | 1987-09-25 | 1987-09-25 | Device for measuring crystal diameter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6483595A JPS6483595A (en) | 1989-03-29 |
| JPH0559877B2 true JPH0559877B2 (enExample) | 1993-09-01 |
Family
ID=17058347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62240361A Granted JPS6483595A (en) | 1987-09-25 | 1987-09-25 | Device for measuring crystal diameter |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4926357A (enExample) |
| EP (1) | EP0315572B1 (enExample) |
| JP (1) | JPS6483595A (enExample) |
| DE (1) | DE3876384T2 (enExample) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2601930B2 (ja) * | 1990-03-29 | 1997-04-23 | 信越半導体株式会社 | 単結晶ネツク部直径制御方法及び装置 |
| JPH0726817B2 (ja) * | 1990-07-28 | 1995-03-29 | 信越半導体株式会社 | 結晶径測定装置 |
| JPH0777996B2 (ja) * | 1990-10-12 | 1995-08-23 | 信越半導体株式会社 | コーン部育成制御方法及び装置 |
| JPH0785489B2 (ja) * | 1991-02-08 | 1995-09-13 | 信越半導体株式会社 | 単結晶の直径計測方法 |
| JPH0717475B2 (ja) * | 1991-02-14 | 1995-03-01 | 信越半導体株式会社 | 単結晶ネック部育成自動制御方法 |
| KR100237848B1 (ko) * | 1991-04-26 | 2000-01-15 | 후루노 토모스케 | 단결정의 인상방법 |
| JP2785532B2 (ja) * | 1991-08-24 | 1998-08-13 | 信越半導体株式会社 | 単結晶棒引上育成制御装置 |
| US5286461A (en) * | 1991-09-20 | 1994-02-15 | Ferrofluidics Corporation | Method and apparatus for melt level detection in czochralski crystal growth systems |
| US5653799A (en) * | 1995-06-02 | 1997-08-05 | Memc Electronic Materials, Inc. | Method for controlling growth of a silicon crystal |
| US5656078A (en) * | 1995-11-14 | 1997-08-12 | Memc Electronic Materials, Inc. | Non-distorting video camera for use with a system for controlling growth of a silicon crystal |
| US5746828A (en) * | 1996-01-16 | 1998-05-05 | General Signal Corporation | Temperature control system for growing high-purity monocrystals |
| US6226032B1 (en) | 1996-07-16 | 2001-05-01 | General Signal Corporation | Crystal diameter control system |
| US5846318A (en) * | 1997-07-17 | 1998-12-08 | Memc Electric Materials, Inc. | Method and system for controlling growth of a silicon crystal |
| US5882402A (en) * | 1997-09-30 | 1999-03-16 | Memc Electronic Materials, Inc. | Method for controlling growth of a silicon crystal |
| US5922127A (en) * | 1997-09-30 | 1999-07-13 | Memc Electronic Materials, Inc. | Heat shield for crystal puller |
| US6106612A (en) * | 1998-06-04 | 2000-08-22 | Seh America Inc. | Level detector and method for detecting a surface level of a material in a container |
| US6171391B1 (en) * | 1998-10-14 | 2001-01-09 | Memc Electronic Materials, Inc. | Method and system for controlling growth of a silicon crystal |
| US6111262A (en) * | 1998-10-30 | 2000-08-29 | Sumitomo Metal Industries, Ltd. | Method for measuring a diameter of a crystal |
| JP4209082B2 (ja) | 2000-06-20 | 2009-01-14 | コバレントマテリアル株式会社 | 単結晶引上げ装置および引上げ方法 |
| DE10120730B4 (de) * | 2001-04-27 | 2006-08-24 | Schott Ag | Verfahren und Vorrichtung zur Messung der Phasengrenze |
| US7573587B1 (en) * | 2008-08-25 | 2009-08-11 | Memc Electronic Materials, Inc. | Method and device for continuously measuring silicon island elevation |
| US10494733B2 (en) | 2013-09-30 | 2019-12-03 | Gtat Corporation | Method of automatically measuring seed melt back of crystalline material |
| AT524604B1 (de) | 2020-12-29 | 2025-01-15 | Fametec Gmbh | Verfahren zur Mitverfolgung des Kristallwachstums eines Einkristalls |
| CN113818075B (zh) * | 2021-09-24 | 2022-09-30 | 西安奕斯伟材料科技有限公司 | 精准调整adc相机的方法、装置、设备及计算机存储介质 |
| US20240158952A1 (en) * | 2021-12-29 | 2024-05-16 | Xi’An Eswin Material Technology Co., Ltd. | Apparatus and Method for Regulating Hot Zone for Single Crystal Growth |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4350557A (en) * | 1974-06-14 | 1982-09-21 | Ferrofluidics Corporation | Method for circumferential dimension measuring and control in crystal rod pulling |
| DD132235A1 (de) * | 1977-01-26 | 1978-09-13 | Helge Fomm | Verfahren und anordnung zur kristalldurchmesserkonstanthaltung bei der kristallzuechtung |
| US4242589A (en) * | 1979-01-15 | 1980-12-30 | Mobil Tyco Solar Energy Corporation | Apparatus for monitoring crystal growth |
| DE2923240A1 (de) * | 1979-06-08 | 1980-12-18 | Leybold Heraeus Gmbh & Co Kg | Messverfahren und messanordnung fuer den durchmesser von einkristallen beim tiegelziehen |
| JPS5618422A (en) * | 1979-07-23 | 1981-02-21 | Hitachi Ltd | Measuring method for diameter of electron beam |
| WO1983002464A1 (en) * | 1982-01-04 | 1983-07-21 | Seymour, Robert, Stephen | Diameter control in czochralski crystal growth |
| US4710258A (en) * | 1984-11-30 | 1987-12-01 | General Signal Corporation | System for controlling the diameter of a crystal in a crystal growing furnace |
| JPH0649631B2 (ja) * | 1986-10-29 | 1994-06-29 | 信越半導体株式会社 | 結晶径測定装置 |
-
1987
- 1987-09-25 JP JP62240361A patent/JPS6483595A/ja active Granted
-
1988
- 1988-09-23 US US07/249,004 patent/US4926357A/en not_active Expired - Fee Related
- 1988-09-26 EP EP88710031A patent/EP0315572B1/en not_active Expired
- 1988-09-26 DE DE8888710031T patent/DE3876384T2/de not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP0315572A2 (en) | 1989-05-10 |
| EP0315572A3 (en) | 1991-01-30 |
| DE3876384T2 (de) | 1993-04-29 |
| JPS6483595A (en) | 1989-03-29 |
| EP0315572B1 (en) | 1992-12-02 |
| US4926357A (en) | 1990-05-15 |
| DE3876384D1 (de) | 1993-01-14 |
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