JPH0557470B2 - - Google Patents
Info
- Publication number
- JPH0557470B2 JPH0557470B2 JP6370688A JP6370688A JPH0557470B2 JP H0557470 B2 JPH0557470 B2 JP H0557470B2 JP 6370688 A JP6370688 A JP 6370688A JP 6370688 A JP6370688 A JP 6370688A JP H0557470 B2 JPH0557470 B2 JP H0557470B2
- Authority
- JP
- Japan
- Prior art keywords
- roll
- gasket
- coating
- metal
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002184 metal Substances 0.000 claims description 27
- 229910052751 metal Inorganic materials 0.000 claims description 27
- 238000007789 sealing Methods 0.000 claims description 12
- 229910052737 gold Inorganic materials 0.000 claims description 8
- 229910052709 silver Inorganic materials 0.000 claims description 8
- 239000010410 layer Substances 0.000 claims description 7
- 239000011247 coating layer Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 description 21
- 239000011248 coating agent Substances 0.000 description 20
- 239000010949 copper Substances 0.000 description 14
- 239000010408 film Substances 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 7
- 230000003647 oxidation Effects 0.000 description 7
- 238000007254 oxidation reaction Methods 0.000 description 7
- 238000002474 experimental method Methods 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000007733 ion plating Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910017770 Cu—Ag Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Landscapes
- Gasket Seals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6370688A JPH01238772A (ja) | 1988-03-18 | 1988-03-18 | 真空シール用金属製ガスケット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6370688A JPH01238772A (ja) | 1988-03-18 | 1988-03-18 | 真空シール用金属製ガスケット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01238772A JPH01238772A (ja) | 1989-09-22 |
| JPH0557470B2 true JPH0557470B2 (enrdf_load_html_response) | 1993-08-24 |
Family
ID=13237086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6370688A Granted JPH01238772A (ja) | 1988-03-18 | 1988-03-18 | 真空シール用金属製ガスケット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01238772A (enrdf_load_html_response) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114999679B (zh) * | 2022-05-26 | 2025-08-26 | 华能山东石岛湾核电有限公司 | 一种高温气冷堆用大口径小截面镀银密封环真空包装方法 |
-
1988
- 1988-03-18 JP JP6370688A patent/JPH01238772A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01238772A (ja) | 1989-09-22 |
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