JPH0556849B2 - - Google Patents
Info
- Publication number
- JPH0556849B2 JPH0556849B2 JP4687586A JP4687586A JPH0556849B2 JP H0556849 B2 JPH0556849 B2 JP H0556849B2 JP 4687586 A JP4687586 A JP 4687586A JP 4687586 A JP4687586 A JP 4687586A JP H0556849 B2 JPH0556849 B2 JP H0556849B2
- Authority
- JP
- Japan
- Prior art keywords
- sic
- substrate
- type
- silicon carbide
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4687586A JPS62204519A (ja) | 1986-03-04 | 1986-03-04 | 炭化シリコンデバイスの基板構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4687586A JPS62204519A (ja) | 1986-03-04 | 1986-03-04 | 炭化シリコンデバイスの基板構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62204519A JPS62204519A (ja) | 1987-09-09 |
| JPH0556849B2 true JPH0556849B2 (enExample) | 1993-08-20 |
Family
ID=12759520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4687586A Granted JPS62204519A (ja) | 1986-03-04 | 1986-03-04 | 炭化シリコンデバイスの基板構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62204519A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01258467A (ja) * | 1988-04-08 | 1989-10-16 | Fujitsu Ltd | 半導体装置の製造方法 |
| SG164324A1 (en) * | 2009-02-20 | 2010-09-29 | Semiconductor Energy Lab | Semiconductor device and manufacturing method of the same |
| JP6781293B2 (ja) * | 2019-03-29 | 2020-11-04 | エア・ウォーター株式会社 | 半導体装置 |
-
1986
- 1986-03-04 JP JP4687586A patent/JPS62204519A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62204519A (ja) | 1987-09-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |