JPH0556470B2 - - Google Patents

Info

Publication number
JPH0556470B2
JPH0556470B2 JP58201739A JP20173983A JPH0556470B2 JP H0556470 B2 JPH0556470 B2 JP H0556470B2 JP 58201739 A JP58201739 A JP 58201739A JP 20173983 A JP20173983 A JP 20173983A JP H0556470 B2 JPH0556470 B2 JP H0556470B2
Authority
JP
Japan
Prior art keywords
layer
amorphous semiconductor
ray
conductive layer
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58201739A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6093372A (ja
Inventor
Tokuzo Komai
Tomomi Katayama
Tatsuo Hashizume
Yasuyoshi Doi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP58201739A priority Critical patent/JPS6093372A/ja
Publication of JPS6093372A publication Critical patent/JPS6093372A/ja
Publication of JPH0556470B2 publication Critical patent/JPH0556470B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Light Receiving Elements (AREA)
  • Measurement Of Radiation (AREA)
JP58201739A 1983-10-27 1983-10-27 半導体ｘ線検出器 Granted JPS6093372A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58201739A JPS6093372A (ja) 1983-10-27 1983-10-27 半導体ｘ線検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58201739A JPS6093372A (ja) 1983-10-27 1983-10-27 半導体ｘ線検出器

Publications (2)

Publication Number Publication Date
JPS6093372A JPS6093372A (ja) 1985-05-25
JPH0556470B2 true JPH0556470B2 (de) 1993-08-19

Family

ID=16446131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58201739A Granted JPS6093372A (ja) 1983-10-27 1983-10-27 半導体ｘ線検出器

Country Status (1)

Country Link
JP (1) JPS6093372A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6271881A (ja) * 1985-09-26 1987-04-02 Toshiba Corp 放射線検出器
NL8503153A (nl) * 1985-11-15 1987-06-01 Optische Ind De Oude Delft Nv Dosismeter voor ioniserende straling.
JPS63243781A (ja) * 1987-03-30 1988-10-11 Kanegafuchi Chem Ind Co Ltd Ｘ線検出装置
JP2638914B2 (ja) * 1988-04-22 1997-08-06 富士通株式会社 露光用ｘ線の強度測定方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146071A (en) * 1979-05-02 1980-11-14 Toshiba Corp Radiant ray detector of semiconductor
JPS57172273A (en) * 1981-04-17 1982-10-23 Toshiba Corp Radiation detector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146071A (en) * 1979-05-02 1980-11-14 Toshiba Corp Radiant ray detector of semiconductor
JPS57172273A (en) * 1981-04-17 1982-10-23 Toshiba Corp Radiation detector

Also Published As

Publication number Publication date
JPS6093372A (ja) 1985-05-25

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