JPH0556031B2 - - Google Patents
Info
- Publication number
- JPH0556031B2 JPH0556031B2 JP62124769A JP12476987A JPH0556031B2 JP H0556031 B2 JPH0556031 B2 JP H0556031B2 JP 62124769 A JP62124769 A JP 62124769A JP 12476987 A JP12476987 A JP 12476987A JP H0556031 B2 JPH0556031 B2 JP H0556031B2
- Authority
- JP
- Japan
- Prior art keywords
- silver
- piezoelectric
- added
- layers
- green sheets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010410 layer Substances 0.000 claims abstract description 48
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000011241 protective layer Substances 0.000 claims abstract description 24
- 239000000463 material Substances 0.000 claims abstract description 17
- 229910052709 silver Inorganic materials 0.000 claims abstract description 16
- 239000004332 silver Substances 0.000 claims abstract description 16
- 238000005245 sintering Methods 0.000 claims abstract description 11
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000010936 titanium Substances 0.000 claims description 7
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 229910052726 zirconium Inorganic materials 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 abstract description 9
- 238000010030 laminating Methods 0.000 abstract description 5
- 239000000843 powder Substances 0.000 abstract description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 abstract description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract description 2
- 229910000464 lead oxide Inorganic materials 0.000 abstract description 2
- 229910000480 nickel oxide Inorganic materials 0.000 abstract description 2
- 229910000484 niobium oxide Inorganic materials 0.000 abstract description 2
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 abstract description 2
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 abstract description 2
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 abstract description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 abstract description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 abstract description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 4
- 230000008602 contraction Effects 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 241000270708 Testudinidae Species 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62124769A JPS63288074A (ja) | 1987-05-20 | 1987-05-20 | 積層圧電素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62124769A JPS63288074A (ja) | 1987-05-20 | 1987-05-20 | 積層圧電素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63288074A JPS63288074A (ja) | 1988-11-25 |
| JPH0556031B2 true JPH0556031B2 (ko) | 1993-08-18 |
Family
ID=14893661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62124769A Granted JPS63288074A (ja) | 1987-05-20 | 1987-05-20 | 積層圧電素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63288074A (ko) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19615694C1 (de) | 1996-04-19 | 1997-07-03 | Siemens Ag | Monolithischer Vielschicht-Piezoaktor und Verfahren zur Herstellung |
| JPH11274595A (ja) | 1998-03-23 | 1999-10-08 | Hitachi Metals Ltd | 圧電セラミックス、積層型圧電セラミックス振動子およびその製造方法 |
| DE10202574A1 (de) * | 2001-02-15 | 2002-09-12 | Ceramtec Ag | Piezokeramischer Vielschichtaktor mit einem Übergangsbereich zwischen dem aktiven Bereich und den inaktiven Kopf- und Fußbereichen |
| JP4817610B2 (ja) * | 2004-03-29 | 2011-11-16 | 京セラ株式会社 | 積層型圧電素子およびその製造方法ならびにこれを用いた噴射装置 |
| DE102005018791A1 (de) * | 2005-01-18 | 2006-07-27 | Epcos Ag | Piezoaktor mit niedriger Streukapazität |
| DE102005027364A1 (de) * | 2005-06-14 | 2006-12-21 | Robert Bosch Gmbh | Piezoaktor |
| JP4942461B2 (ja) * | 2006-11-21 | 2012-05-30 | 京セラ株式会社 | セラミック電子部品及び噴射装置 |
| EP2164119B1 (en) * | 2007-05-30 | 2015-04-29 | Kyocera Corporation | Laminated piezoelectric element, injection device and fuel injection system |
| WO2011052528A1 (ja) | 2009-10-28 | 2011-05-05 | 京セラ株式会社 | 積層型圧電素子およびそれを用いた噴射装置ならびに燃料噴射システム |
-
1987
- 1987-05-20 JP JP62124769A patent/JPS63288074A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63288074A (ja) | 1988-11-25 |
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