JPH0555930B2 - - Google Patents

Info

Publication number
JPH0555930B2
JPH0555930B2 JP60209378A JP20937885A JPH0555930B2 JP H0555930 B2 JPH0555930 B2 JP H0555930B2 JP 60209378 A JP60209378 A JP 60209378A JP 20937885 A JP20937885 A JP 20937885A JP H0555930 B2 JPH0555930 B2 JP H0555930B2
Authority
JP
Japan
Prior art keywords
film
thin film
substrate
incident angle
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60209378A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6267729A (ja
Inventor
Takao Nakatsuka
Minoru Kume
Daisuke Kishimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP20937885A priority Critical patent/JPS6267729A/ja
Priority to US06/864,357 priority patent/US4767516A/en
Priority to EP86106807A priority patent/EP0202645B1/en
Priority to DE8686106807T priority patent/DE3682942D1/de
Publication of JPS6267729A publication Critical patent/JPS6267729A/ja
Publication of JPH0555930B2 publication Critical patent/JPH0555930B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
JP20937885A 1985-05-20 1985-09-20 垂直磁気記録媒体の製造方法 Granted JPS6267729A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP20937885A JPS6267729A (ja) 1985-09-20 1985-09-20 垂直磁気記録媒体の製造方法
US06/864,357 US4767516A (en) 1985-05-20 1986-05-19 Method for making magnetic recording media
EP86106807A EP0202645B1 (en) 1985-05-20 1986-05-20 Method and apparatus for making magnetic recording media
DE8686106807T DE3682942D1 (de) 1985-05-20 1986-05-20 Verfahren und vorrichtung zur erzeugung magnetischer aufzeichnungstraeger.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20937885A JPS6267729A (ja) 1985-09-20 1985-09-20 垂直磁気記録媒体の製造方法

Publications (2)

Publication Number Publication Date
JPS6267729A JPS6267729A (ja) 1987-03-27
JPH0555930B2 true JPH0555930B2 (enExample) 1993-08-18

Family

ID=16571927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20937885A Granted JPS6267729A (ja) 1985-05-20 1985-09-20 垂直磁気記録媒体の製造方法

Country Status (1)

Country Link
JP (1) JPS6267729A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5156552B2 (ja) * 2008-09-08 2013-03-06 富士フイルム株式会社 ガスバリアフィルムの製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5680831A (en) * 1979-11-30 1981-07-02 Toshiba Corp Producing device for magnetic recording medium
JPS59129944A (ja) * 1983-01-12 1984-07-26 Anelva Corp 磁気記録媒体の製造方法及び磁気記録媒体の製造装置
JPS59210531A (ja) * 1983-05-16 1984-11-29 Teijin Ltd 磁気記録媒体及びその製造法

Also Published As

Publication number Publication date
JPS6267729A (ja) 1987-03-27

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