JPH0554690B2 - - Google Patents
Info
- Publication number
- JPH0554690B2 JPH0554690B2 JP59101976A JP10197684A JPH0554690B2 JP H0554690 B2 JPH0554690 B2 JP H0554690B2 JP 59101976 A JP59101976 A JP 59101976A JP 10197684 A JP10197684 A JP 10197684A JP H0554690 B2 JPH0554690 B2 JP H0554690B2
- Authority
- JP
- Japan
- Prior art keywords
- heater
- core tube
- furnace core
- furnace
- zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 31
- 235000012431 wafers Nutrition 0.000 description 17
- 238000009826 distribution Methods 0.000 description 8
- 238000012986 modification Methods 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 230000005855 radiation Effects 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000004904 shortening Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 239000011491 glass wool Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910000953 kanthal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007634 remodeling Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10197684A JPS60245215A (ja) | 1984-05-21 | 1984-05-21 | 縦型炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10197684A JPS60245215A (ja) | 1984-05-21 | 1984-05-21 | 縦型炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60245215A JPS60245215A (ja) | 1985-12-05 |
| JPH0554690B2 true JPH0554690B2 (ko) | 1993-08-13 |
Family
ID=14314892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10197684A Granted JPS60245215A (ja) | 1984-05-21 | 1984-05-21 | 縦型炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60245215A (ko) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0815144B2 (ja) * | 1986-04-18 | 1996-02-14 | 株式会社日立製作所 | 縦型処理装置 |
| JPH0693439B2 (ja) * | 1987-03-20 | 1994-11-16 | 株式会社日立製作所 | 半導体ウエハの熱処理装置 |
| JPS6437034U (ko) * | 1987-08-28 | 1989-03-06 | ||
| JPH0744159B2 (ja) * | 1987-09-11 | 1995-05-15 | 株式会社日立製作所 | 半導体ウエハの熱処理装置および熱処理方法 |
| JP2756566B2 (ja) * | 1987-11-21 | 1998-05-25 | 東京エレクトロン株式会社 | 縦型熱処理装置 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5443650U (ko) * | 1977-08-31 | 1979-03-26 | ||
| JPS57117782A (en) * | 1981-01-12 | 1982-07-22 | Kokusai Electric Co Ltd | Circular electric furnace |
| JPS5833831A (ja) * | 1981-08-24 | 1983-02-28 | Hitachi Ltd | 熱処理炉 |
| JPS58135633A (ja) * | 1982-02-08 | 1983-08-12 | Hitachi Ltd | シリコン・エピタキシヤル成長方法 |
| JPS58145697A (ja) * | 1982-02-19 | 1983-08-30 | Olympus Optical Co Ltd | エピタキシヤルシリコン製造装置 |
-
1984
- 1984-05-21 JP JP10197684A patent/JPS60245215A/ja active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5443650U (ko) * | 1977-08-31 | 1979-03-26 | ||
| JPS57117782A (en) * | 1981-01-12 | 1982-07-22 | Kokusai Electric Co Ltd | Circular electric furnace |
| JPS5833831A (ja) * | 1981-08-24 | 1983-02-28 | Hitachi Ltd | 熱処理炉 |
| JPS58135633A (ja) * | 1982-02-08 | 1983-08-12 | Hitachi Ltd | シリコン・エピタキシヤル成長方法 |
| JPS58145697A (ja) * | 1982-02-19 | 1983-08-30 | Olympus Optical Co Ltd | エピタキシヤルシリコン製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60245215A (ja) | 1985-12-05 |
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