JPS60245215A - 縦型炉 - Google Patents

縦型炉

Info

Publication number
JPS60245215A
JPS60245215A JP10197684A JP10197684A JPS60245215A JP S60245215 A JPS60245215 A JP S60245215A JP 10197684 A JP10197684 A JP 10197684A JP 10197684 A JP10197684 A JP 10197684A JP S60245215 A JPS60245215 A JP S60245215A
Authority
JP
Japan
Prior art keywords
heater
core tube
furnace
length
furnace core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10197684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0554690B2 (ko
Inventor
Kazunori Imaoka
今岡　和典
Takao Miura
隆雄 三浦
Akinao Ogawa
小川　明直
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10197684A priority Critical patent/JPS60245215A/ja
Publication of JPS60245215A publication Critical patent/JPS60245215A/ja
Publication of JPH0554690B2 publication Critical patent/JPH0554690B2/ja
Granted legal-status Critical Current

Links

JP10197684A 1984-05-21 1984-05-21 縦型炉 Granted JPS60245215A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10197684A JPS60245215A (ja) 1984-05-21 1984-05-21 縦型炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10197684A JPS60245215A (ja) 1984-05-21 1984-05-21 縦型炉

Publications (2)

Publication Number Publication Date
JPS60245215A true JPS60245215A (ja) 1985-12-05
JPH0554690B2 JPH0554690B2 (ko) 1993-08-13

Family

ID=14314892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10197684A Granted JPS60245215A (ja) 1984-05-21 1984-05-21 縦型炉

Country Status (1)

Country Link
JP (1) JPS60245215A (ko)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62245624A (ja) * 1986-04-18 1987-10-26 Hitachi Ltd 縦型処理装置
JPS63232422A (ja) * 1987-03-20 1988-09-28 Hitachi Ltd 半導体ウエハの熱処理装置
JPS6437034U (ko) * 1987-08-28 1989-03-06
JPS6471119A (en) * 1987-09-11 1989-03-16 Hitachi Ltd Thermal treatment equipment for semiconductor wafer
JPH01236615A (ja) * 1987-11-21 1989-09-21 Tel Sagami Ltd 縦型熱処理装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5443650U (ko) * 1977-08-31 1979-03-26
JPS57117782A (en) * 1981-01-12 1982-07-22 Kokusai Electric Co Ltd Circular electric furnace
JPS5833831A (ja) * 1981-08-24 1983-02-28 Hitachi Ltd 熱処理炉
JPS58135633A (ja) * 1982-02-08 1983-08-12 Hitachi Ltd シリコン・エピタキシヤル成長方法
JPS58145697A (ja) * 1982-02-19 1983-08-30 Olympus Optical Co Ltd エピタキシヤルシリコン製造装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5443650U (ko) * 1977-08-31 1979-03-26
JPS57117782A (en) * 1981-01-12 1982-07-22 Kokusai Electric Co Ltd Circular electric furnace
JPS5833831A (ja) * 1981-08-24 1983-02-28 Hitachi Ltd 熱処理炉
JPS58135633A (ja) * 1982-02-08 1983-08-12 Hitachi Ltd シリコン・エピタキシヤル成長方法
JPS58145697A (ja) * 1982-02-19 1983-08-30 Olympus Optical Co Ltd エピタキシヤルシリコン製造装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62245624A (ja) * 1986-04-18 1987-10-26 Hitachi Ltd 縦型処理装置
JPS63232422A (ja) * 1987-03-20 1988-09-28 Hitachi Ltd 半導体ウエハの熱処理装置
JPS6437034U (ko) * 1987-08-28 1989-03-06
JPS6471119A (en) * 1987-09-11 1989-03-16 Hitachi Ltd Thermal treatment equipment for semiconductor wafer
JPH01236615A (ja) * 1987-11-21 1989-09-21 Tel Sagami Ltd 縦型熱処理装置

Also Published As

Publication number Publication date
JPH0554690B2 (ko) 1993-08-13

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