JPS6437034U - - Google Patents

Info

Publication number
JPS6437034U
JPS6437034U JP13169587U JP13169587U JPS6437034U JP S6437034 U JPS6437034 U JP S6437034U JP 13169587 U JP13169587 U JP 13169587U JP 13169587 U JP13169587 U JP 13169587U JP S6437034 U JPS6437034 U JP S6437034U
Authority
JP
Japan
Prior art keywords
reaction tube
lower ends
utility
model registration
vertical diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13169587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13169587U priority Critical patent/JPS6437034U/ja
Publication of JPS6437034U publication Critical patent/JPS6437034U/ja
Pending legal-status Critical Current

Links

JP13169587U 1987-08-28 1987-08-28 Pending JPS6437034U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13169587U JPS6437034U (ko) 1987-08-28 1987-08-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13169587U JPS6437034U (ko) 1987-08-28 1987-08-28

Publications (1)

Publication Number Publication Date
JPS6437034U true JPS6437034U (ko) 1989-03-06

Family

ID=31388003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13169587U Pending JPS6437034U (ko) 1987-08-28 1987-08-28

Country Status (1)

Country Link
JP (1) JPS6437034U (ko)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60245215A (ja) * 1984-05-21 1985-12-05 Fujitsu Ltd 縦型炉
JPS61114522A (ja) * 1984-11-09 1986-06-02 Hitachi Ltd 半導体ウエハ加熱装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60245215A (ja) * 1984-05-21 1985-12-05 Fujitsu Ltd 縦型炉
JPS61114522A (ja) * 1984-11-09 1986-06-02 Hitachi Ltd 半導体ウエハ加熱装置

Similar Documents

Publication Publication Date Title
JPS6437034U (ko)
JPS63121431U (ko)
JPS6223870U (ko)
JPH0160533U (ko)
JPS6274330U (ko)
JPS61121304U (ko)
JPH0256435U (ko)
JPS6334156U (ko)
JPS6354294U (ko)
JPS6448023U (ko)
JPH0459134U (ko)
JPS6188233U (ko)
JPH0423141U (ko)
JPH0425234U (ko)
JPS6389239U (ko)
JPS62203272U (ko)
JPS63104868U (ko)
JPS61106025U (ko)
JPH0441969U (ko)
JPH01100020U (ko)
JPH0389387U (ko)
JPS62167729U (ko)
JPS6355002U (ko)
JPS62142603U (ko)
JPS6426834U (ko)