JPS6437034U - - Google Patents
Info
- Publication number
- JPS6437034U JPS6437034U JP13169587U JP13169587U JPS6437034U JP S6437034 U JPS6437034 U JP S6437034U JP 13169587 U JP13169587 U JP 13169587U JP 13169587 U JP13169587 U JP 13169587U JP S6437034 U JPS6437034 U JP S6437034U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- lower ends
- utility
- model registration
- vertical diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13169587U JPS6437034U (ko) | 1987-08-28 | 1987-08-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13169587U JPS6437034U (ko) | 1987-08-28 | 1987-08-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6437034U true JPS6437034U (ko) | 1989-03-06 |
Family
ID=31388003
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13169587U Pending JPS6437034U (ko) | 1987-08-28 | 1987-08-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6437034U (ko) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60245215A (ja) * | 1984-05-21 | 1985-12-05 | Fujitsu Ltd | 縦型炉 |
JPS61114522A (ja) * | 1984-11-09 | 1986-06-02 | Hitachi Ltd | 半導体ウエハ加熱装置 |
-
1987
- 1987-08-28 JP JP13169587U patent/JPS6437034U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60245215A (ja) * | 1984-05-21 | 1985-12-05 | Fujitsu Ltd | 縦型炉 |
JPS61114522A (ja) * | 1984-11-09 | 1986-06-02 | Hitachi Ltd | 半導体ウエハ加熱装置 |