JPS6448023U - - Google Patents
Info
- Publication number
- JPS6448023U JPS6448023U JP14505787U JP14505787U JPS6448023U JP S6448023 U JPS6448023 U JP S6448023U JP 14505787 U JP14505787 U JP 14505787U JP 14505787 U JP14505787 U JP 14505787U JP S6448023 U JPS6448023 U JP S6448023U
- Authority
- JP
- Japan
- Prior art keywords
- furnace mouth
- mouth portion
- vertical device
- insulating material
- heat insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011810 insulating material Substances 0.000 claims description 2
- 238000002791 soaking Methods 0.000 claims description 2
- 239000000428 dust Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14505787U JPS6448023U (ko) | 1987-09-21 | 1987-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14505787U JPS6448023U (ko) | 1987-09-21 | 1987-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6448023U true JPS6448023U (ko) | 1989-03-24 |
Family
ID=31413313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14505787U Pending JPS6448023U (ko) | 1987-09-21 | 1987-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6448023U (ko) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63257219A (ja) * | 1987-04-15 | 1988-10-25 | Hitachi Ltd | 縦型処理装置 |
-
1987
- 1987-09-21 JP JP14505787U patent/JPS6448023U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63257219A (ja) * | 1987-04-15 | 1988-10-25 | Hitachi Ltd | 縦型処理装置 |