JPH0551440B2 - - Google Patents

Info

Publication number
JPH0551440B2
JPH0551440B2 JP60057414A JP5741485A JPH0551440B2 JP H0551440 B2 JPH0551440 B2 JP H0551440B2 JP 60057414 A JP60057414 A JP 60057414A JP 5741485 A JP5741485 A JP 5741485A JP H0551440 B2 JPH0551440 B2 JP H0551440B2
Authority
JP
Japan
Prior art keywords
force
plate
elastic body
displacement
leaf spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60057414A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61226285A (ja
Inventor
Kazuo Asakawa
Nobuhiko Onda
Tadashi Akita
Tooru Kamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP60057414A priority Critical patent/JPS61226285A/ja
Priority to CA000491259A priority patent/CA1259816A/en
Priority to US06/779,640 priority patent/US4762006A/en
Priority to DE8585306871T priority patent/DE3584066D1/de
Priority to EP85306871A priority patent/EP0177284B1/en
Priority to AU48139/85A priority patent/AU564927B2/en
Priority to ES547380A priority patent/ES8609704A1/es
Priority to KR1019850007175A priority patent/KR910000267B1/ko
Publication of JPS61226285A publication Critical patent/JPS61226285A/ja
Priority to US07/192,184 priority patent/US4862751A/en
Publication of JPH0551440B2 publication Critical patent/JPH0551440B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Automatic Assembly (AREA)
  • Manipulator (AREA)
JP60057414A 1984-09-29 1985-03-20 支持装置 Granted JPS61226285A (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP60057414A JPS61226285A (ja) 1985-03-20 1985-03-20 支持装置
CA000491259A CA1259816A (en) 1984-09-29 1985-09-20 Force-detecting apparatus
US06/779,640 US4762006A (en) 1984-09-29 1985-09-24 Force-detecting apparatus
AU48139/85A AU564927B2 (en) 1984-09-29 1985-09-27 Force detecting apparatus
EP85306871A EP0177284B1 (en) 1984-09-29 1985-09-27 Force-detecting apparatus
DE8585306871T DE3584066D1 (de) 1984-09-29 1985-09-27 Kraftmessvorrichtung.
ES547380A ES8609704A1 (es) 1984-09-29 1985-09-27 Un aparato detector de fuerza
KR1019850007175A KR910000267B1 (ko) 1984-09-29 1985-09-28 외력 검출장치
US07/192,184 US4862751A (en) 1984-09-29 1988-05-10 Force-detecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60057414A JPS61226285A (ja) 1985-03-20 1985-03-20 支持装置

Publications (2)

Publication Number Publication Date
JPS61226285A JPS61226285A (ja) 1986-10-08
JPH0551440B2 true JPH0551440B2 (https=) 1993-08-02

Family

ID=13054987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60057414A Granted JPS61226285A (ja) 1984-09-29 1985-03-20 支持装置

Country Status (1)

Country Link
JP (1) JPS61226285A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013108398A1 (ja) * 2012-01-20 2013-07-25 上野精機株式会社 電子部品載置ステージ、位置決め装置、及び工程処理装置
JP6506104B2 (ja) * 2015-06-03 2019-04-24 株式会社Ｓｏｋｅｎ 電磁界計測装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58164689U (ja) * 1982-04-30 1983-11-02 株式会社小松製作所 ロボツトのハンド装置
JPS5953192A (ja) * 1982-09-21 1984-03-27 富士通株式会社 支持装置

Also Published As

Publication number Publication date
JPS61226285A (ja) 1986-10-08

Similar Documents

Publication Publication Date Title
US10583570B2 (en) Displacement measurement device, robot, and robot arm
CA1259816A (en) Force-detecting apparatus
US6868356B2 (en) Method of and apparatus for correction of coordinate measurement errors due to vibrations in coordinate measuring machines (cmms)
US7490524B2 (en) Force sensor chip
US7536922B2 (en) Force sensor chip
JP6918647B2 (ja) 力センサ、トルクセンサ、力覚センサ、指先力センサ、およびその製造方法
JPH05216514A (ja) 重力ベクトルに対するロボットアームジョイントの位置の較正方法
KR102183179B1 (ko) 스트레인게이지 방식의 다축 힘토크센서
CN111226100B (zh) 力传感器和配备有力传感器的机器人
WO2007015148A2 (en) Sensor unit
JP7755609B2 (ja) 結合負荷とより少ない歪みゲージを用いたトルクセンサ
JPH10138075A (ja) ワーク姿勢調整装置、調整具及び調整方法
JP2767766B2 (ja) ６軸力覚センサ
JP7146609B2 (ja) 検出装置、駆動装置、ロボット装置、検出方法、物品の製造方法、制御方法、プログラム、及び記録媒体
GB2597993A (en) Torque sensor element and torque sensor
JPH0551440B2 (https=)
JP2002346959A (ja) パラレルメカニズムのフレーム変形補正方法およびその装置
JPH01119731A (ja) 多軸力覚センサ
JP2006058211A (ja) 歪みゲージ型センサ
JPH0310893B2 (https=)
JPH041540A (ja) 力覚センサ
JPH06258340A (ja) 多次元加速度検出器
JPS6183929A (ja) 力検出装置
JPS61292028A (ja) 力検出装置
JPS63226707A (ja) 微細位置決め装置の変位制御装置