JPH05508517A - ポリプロピレン製ウェハーキャリヤ - Google Patents

ポリプロピレン製ウェハーキャリヤ

Info

Publication number
JPH05508517A
JPH05508517A JP4505409A JP50540992A JPH05508517A JP H05508517 A JPH05508517 A JP H05508517A JP 4505409 A JP4505409 A JP 4505409A JP 50540992 A JP50540992 A JP 50540992A JP H05508517 A JPH05508517 A JP H05508517A
Authority
JP
Japan
Prior art keywords
wafer
polypropylene
storage device
wafers
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4505409A
Other languages
English (en)
Japanese (ja)
Inventor
ミケルセン，カーク・ジェイ
Original Assignee
フルオロウェア・インコーポレーテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by フルオロウェア・インコーポレーテッド filed Critical フルオロウェア・インコーポレーテッド
Publication of JPH05508517A publication Critical patent/JPH05508517A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67366—Closed carriers characterised by materials, roughness, coatings or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Containers Having Bodies Formed In One Piece (AREA)
JP4505409A 1991-04-11 1992-01-21 ポリプロピレン製ウェハーキャリヤ Pending JPH05508517A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US68370591A 1991-04-11 1991-04-11
US683,705 1991-04-11

Publications (1)

Publication Number Publication Date
JPH05508517A true JPH05508517A (ja) 1993-11-25

Family

ID=24745120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4505409A Pending JPH05508517A (ja) 1991-04-11 1992-01-21 ポリプロピレン製ウェハーキャリヤ

Country Status (5)

Country Link
EP (1) EP0533859A1 (ko)
JP (1) JPH05508517A (ko)
KR (1) KR930700975A (ko)
CN (1) CN1065634A (ko)
WO (1) WO1992019012A2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997037381A1 (fr) * 1996-03-29 1997-10-09 Tokyo Electron Limited Instrument utilise dans une salle blanche et equipement de montage

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL9302230A (nl) * 1993-12-21 1995-07-17 Fred Ernest Gardner Golfenergie-omvormer.
JPH0969557A (ja) * 1995-08-30 1997-03-11 Shin Etsu Handotai Co Ltd ウエーハの保管／輸送方法
JP2001298076A (ja) * 2000-04-12 2001-10-26 Sony Corp 基板搬送コンテナ
CN101070408B (zh) * 2006-05-12 2010-08-18 中国科学院化学研究所 滚动角可控的聚丙烯超疏水膜或块材及其制备方法
CN103943541A (zh) * 2014-05-04 2014-07-23 上海先进半导体制造股份有限公司 盖板载片盒装置
EP3455134A4 (en) * 2016-05-09 2020-01-22 Eric Loth METHODS AND SYSTEMS FOR LUBRICATING LUBRICATING ELASTOMERIC COATINGS

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3413837A1 (de) * 1984-04-12 1985-10-17 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Verpackung fuer halbleiterscheiben
JPH0620911B2 (ja) * 1986-12-27 1994-03-23 日本鉱業株式会社 半導体ウェーハー包装容器
DE4024576A1 (de) * 1990-08-02 1992-02-06 Bosch Gmbh Robert Vorrichtung zum einseitigen aetzen einer halbleiterscheibe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997037381A1 (fr) * 1996-03-29 1997-10-09 Tokyo Electron Limited Instrument utilise dans une salle blanche et equipement de montage

Also Published As

Publication number Publication date
CN1065634A (zh) 1992-10-28
WO1992019012A3 (en) 1992-12-10
WO1992019012A2 (en) 1992-10-29
KR930700975A (ko) 1993-03-16
EP0533859A1 (en) 1993-03-31

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