JPH054958B2 - - Google Patents

Info

Publication number
JPH054958B2
JPH054958B2 JP19626187A JP19626187A JPH054958B2 JP H054958 B2 JPH054958 B2 JP H054958B2 JP 19626187 A JP19626187 A JP 19626187A JP 19626187 A JP19626187 A JP 19626187A JP H054958 B2 JPH054958 B2 JP H054958B2
Authority
JP
Japan
Prior art keywords
silicon
substrate
silane
raw material
hydrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP19626187A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6442394A (en
Inventor
Yoshio Ooshita
Tooru Tatsumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP19626187A priority Critical patent/JPS6442394A/ja
Publication of JPS6442394A publication Critical patent/JPS6442394A/ja
Publication of JPH054958B2 publication Critical patent/JPH054958B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP19626187A 1987-08-07 1987-08-07 Semiconductor growing apparatus Granted JPS6442394A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19626187A JPS6442394A (en) 1987-08-07 1987-08-07 Semiconductor growing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19626187A JPS6442394A (en) 1987-08-07 1987-08-07 Semiconductor growing apparatus

Publications (2)

Publication Number Publication Date
JPS6442394A JPS6442394A (en) 1989-02-14
JPH054958B2 true JPH054958B2 (enrdf_load_html_response) 1993-01-21

Family

ID=16354866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19626187A Granted JPS6442394A (en) 1987-08-07 1987-08-07 Semiconductor growing apparatus

Country Status (1)

Country Link
JP (1) JPS6442394A (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0933190A (ja) * 1995-07-20 1997-02-07 Denso Corp 積層型熱交換器

Also Published As

Publication number Publication date
JPS6442394A (en) 1989-02-14

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