JPH054958B2 - - Google Patents
Info
- Publication number
- JPH054958B2 JPH054958B2 JP19626187A JP19626187A JPH054958B2 JP H054958 B2 JPH054958 B2 JP H054958B2 JP 19626187 A JP19626187 A JP 19626187A JP 19626187 A JP19626187 A JP 19626187A JP H054958 B2 JPH054958 B2 JP H054958B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- substrate
- silane
- raw material
- hydrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052710 silicon Inorganic materials 0.000 claims description 38
- 239000010703 silicon Substances 0.000 claims description 38
- 229910000077 silane Inorganic materials 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 24
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 23
- 239000007787 solid Substances 0.000 claims description 14
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical compound [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 claims description 11
- 238000006243 chemical reaction Methods 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 37
- 239000002994 raw material Substances 0.000 description 21
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 14
- 239000001257 hydrogen Substances 0.000 description 10
- 229910052739 hydrogen Inorganic materials 0.000 description 10
- 238000011109 contamination Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 8
- 239000012535 impurity Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010494 dissociation reaction Methods 0.000 description 2
- 230000005593 dissociations Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- -1 that is Substances 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19626187A JPS6442394A (en) | 1987-08-07 | 1987-08-07 | Semiconductor growing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19626187A JPS6442394A (en) | 1987-08-07 | 1987-08-07 | Semiconductor growing apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6442394A JPS6442394A (en) | 1989-02-14 |
| JPH054958B2 true JPH054958B2 (enrdf_load_html_response) | 1993-01-21 |
Family
ID=16354866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19626187A Granted JPS6442394A (en) | 1987-08-07 | 1987-08-07 | Semiconductor growing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6442394A (enrdf_load_html_response) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0933190A (ja) * | 1995-07-20 | 1997-02-07 | Denso Corp | 積層型熱交換器 |
-
1987
- 1987-08-07 JP JP19626187A patent/JPS6442394A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6442394A (en) | 1989-02-14 |
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