JPH0549170B2 - - Google Patents

Info

Publication number
JPH0549170B2
JPH0549170B2 JP62177597A JP17759787A JPH0549170B2 JP H0549170 B2 JPH0549170 B2 JP H0549170B2 JP 62177597 A JP62177597 A JP 62177597A JP 17759787 A JP17759787 A JP 17759787A JP H0549170 B2 JPH0549170 B2 JP H0549170B2
Authority
JP
Japan
Prior art keywords
infrared
layer
opening
dielectric layer
cold shield
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62177597A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6420656A (en
Inventor
Tooru Maekawa
Hiroshi Takigawa
Shigeki Hamashima
Tomoshi Ueda
Tetsuya Kawachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62177597A priority Critical patent/JPS6420656A/ja
Publication of JPS6420656A publication Critical patent/JPS6420656A/ja
Publication of JPH0549170B2 publication Critical patent/JPH0549170B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP62177597A 1987-07-15 1987-07-15 Cold shield for infrared ray detector Granted JPS6420656A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62177597A JPS6420656A (en) 1987-07-15 1987-07-15 Cold shield for infrared ray detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62177597A JPS6420656A (en) 1987-07-15 1987-07-15 Cold shield for infrared ray detector

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4205366A Division JPH05231928A (ja) 1992-07-31 1992-07-31 赤外線検知素子用コールドシールド

Publications (2)

Publication Number Publication Date
JPS6420656A JPS6420656A (en) 1989-01-24
JPH0549170B2 true JPH0549170B2 (cs) 1993-07-23

Family

ID=16033778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62177597A Granted JPS6420656A (en) 1987-07-15 1987-07-15 Cold shield for infrared ray detector

Country Status (1)

Country Link
JP (1) JPS6420656A (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05231928A (ja) * 1992-07-31 1993-09-07 Fujitsu Ltd 赤外線検知素子用コールドシールド
US7994599B2 (en) * 2005-06-27 2011-08-09 Meas Deutschland Gmbh Device for the detection of electromagnetic waves and method for producing such a device
JP6003605B2 (ja) * 2012-12-12 2016-10-05 Tdk株式会社 赤外線検知装置
JP5860071B2 (ja) * 2014-02-12 2016-02-16 株式会社半導体エネルギー研究所 半導体装置

Also Published As

Publication number Publication date
JPS6420656A (en) 1989-01-24

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