JPH0547518B2 - - Google Patents

Info

Publication number
JPH0547518B2
JPH0547518B2 JP21517085A JP21517085A JPH0547518B2 JP H0547518 B2 JPH0547518 B2 JP H0547518B2 JP 21517085 A JP21517085 A JP 21517085A JP 21517085 A JP21517085 A JP 21517085A JP H0547518 B2 JPH0547518 B2 JP H0547518B2
Authority
JP
Japan
Prior art keywords
substrate
fluorosilane
thin film
single crystal
silane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP21517085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6278191A (ja
Inventor
Makoto Konagai
Yorihisa Kitagawa
Nobuhiro Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP21517085A priority Critical patent/JPS6278191A/ja
Publication of JPS6278191A publication Critical patent/JPS6278191A/ja
Publication of JPH0547518B2 publication Critical patent/JPH0547518B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/123—Ultraviolet light

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP21517085A 1985-09-30 1985-09-30 単結晶薄膜の製造方法 Granted JPS6278191A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21517085A JPS6278191A (ja) 1985-09-30 1985-09-30 単結晶薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21517085A JPS6278191A (ja) 1985-09-30 1985-09-30 単結晶薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS6278191A JPS6278191A (ja) 1987-04-10
JPH0547518B2 true JPH0547518B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-16

Family

ID=16667819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21517085A Granted JPS6278191A (ja) 1985-09-30 1985-09-30 単結晶薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS6278191A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6330398A (ja) * 1986-07-23 1988-02-09 Toshiba Corp エピタキシャル成長法
JPH02225399A (ja) * 1988-11-11 1990-09-07 Fujitsu Ltd エピタキシャル成長方法および成長装置

Also Published As

Publication number Publication date
JPS6278191A (ja) 1987-04-10

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees