JPH0546674B2 - - Google Patents

Info

Publication number
JPH0546674B2
JPH0546674B2 JP24049086A JP24049086A JPH0546674B2 JP H0546674 B2 JPH0546674 B2 JP H0546674B2 JP 24049086 A JP24049086 A JP 24049086A JP 24049086 A JP24049086 A JP 24049086A JP H0546674 B2 JPH0546674 B2 JP H0546674B2
Authority
JP
Japan
Prior art keywords
heater
support member
mosi
ceramic
molybdenum silicide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP24049086A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6396883A (ja
Inventor
Naoya Nunogaki
Tetsuo Toyama
Kazuhiro Inokuchi
Nobue Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Soken Inc
Original Assignee
Nippon Soken Inc
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Soken Inc, NipponDenso Co Ltd filed Critical Nippon Soken Inc
Priority to JP24049086A priority Critical patent/JPS6396883A/ja
Priority to US07/106,516 priority patent/US4814581A/en
Priority to DE3734274A priority patent/DE3734274C2/de
Publication of JPS6396883A publication Critical patent/JPS6396883A/ja
Publication of JPH0546674B2 publication Critical patent/JPH0546674B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
JP24049086A 1986-10-09 1986-10-09 セラミツクヒ−タ Granted JPS6396883A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP24049086A JPS6396883A (ja) 1986-10-09 1986-10-09 セラミツクヒ−タ
US07/106,516 US4814581A (en) 1986-10-09 1987-10-09 Electrically insulating ceramic sintered body
DE3734274A DE3734274C2 (de) 1986-10-09 1987-10-09 Keramische Glühkerze und Verfahren zu deren Herstellung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24049086A JPS6396883A (ja) 1986-10-09 1986-10-09 セラミツクヒ−タ

Publications (2)

Publication Number Publication Date
JPS6396883A JPS6396883A (ja) 1988-04-27
JPH0546674B2 true JPH0546674B2 (ko) 1993-07-14

Family

ID=17060287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24049086A Granted JPS6396883A (ja) 1986-10-09 1986-10-09 セラミツクヒ−タ

Country Status (1)

Country Link
JP (1) JPS6396883A (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BR9700464A (pt) * 1996-03-29 1998-11-03 Ngk Spark Plug Co Aquecedor cerâmico
BR9700466A (pt) * 1996-03-29 1998-11-03 Ngk Spark Plug Co Aquecedor cerâmico
JP3551635B2 (ja) * 1996-07-23 2004-08-11 宇部興産株式会社 セラミックス抵抗発熱体及びその製造方法
DE19860919C1 (de) * 1998-12-04 2000-02-10 Bosch Gmbh Robert Keramisches Heizelement und Verfahren zu dessen Herstellung
US6274079B1 (en) * 1999-06-23 2001-08-14 Robert Bosch Gmbh Ceramic pin heating element with integrated connector contacts and method for making same
JP4562460B2 (ja) * 2004-08-27 2010-10-13 京セラ株式会社 ヒータとそれを用いたウェハ加熱装置
JP2005348820A (ja) * 2004-06-08 2005-12-22 Olympus Corp 発熱素子、それを用いた医療用処置具、処置装置
JP2006305236A (ja) * 2005-05-02 2006-11-09 Olympus Medical Systems Corp 発熱処置具
JP6807660B2 (ja) * 2016-06-01 2021-01-06 日本特殊陶業株式会社 セラミックヒータ素子、および、セラミックグロープラグ

Also Published As

Publication number Publication date
JPS6396883A (ja) 1988-04-27

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