JPH0546101B2 - - Google Patents
Info
- Publication number
- JPH0546101B2 JPH0546101B2 JP21832688A JP21832688A JPH0546101B2 JP H0546101 B2 JPH0546101 B2 JP H0546101B2 JP 21832688 A JP21832688 A JP 21832688A JP 21832688 A JP21832688 A JP 21832688A JP H0546101 B2 JPH0546101 B2 JP H0546101B2
- Authority
- JP
- Japan
- Prior art keywords
- resin
- film
- semiconductor substrate
- pii
- memory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 62
- 230000003068 static effect Effects 0.000 claims description 8
- 239000003513 alkali Substances 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 4
- 229920005591 polysilicon Polymers 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 48
- 239000011347 resin Substances 0.000 description 45
- 229920005989 resin Polymers 0.000 description 45
- 229920001721 polyimide Polymers 0.000 description 28
- 239000009719 polyimide resin Substances 0.000 description 24
- 238000009792 diffusion process Methods 0.000 description 21
- 239000000919 ceramic Substances 0.000 description 19
- 239000011521 glass Substances 0.000 description 17
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 12
- 239000012535 impurity Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 11
- 229910052581 Si3N4 Inorganic materials 0.000 description 10
- 230000005260 alpha ray Effects 0.000 description 10
- 239000011574 phosphorus Substances 0.000 description 10
- 229910052698 phosphorus Inorganic materials 0.000 description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 10
- 239000008188 pellet Substances 0.000 description 9
- 239000002585 base Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 230000003321 amplification Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000007257 malfunction Effects 0.000 description 6
- 238000003199 nucleic acid amplification method Methods 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 230000014759 maintenance of location Effects 0.000 description 5
- 229910052770 Uranium Inorganic materials 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 239000002952 polymeric resin Substances 0.000 description 4
- 229920003002 synthetic resin Polymers 0.000 description 4
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 4
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 3
- 229910052776 Thorium Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920000620 organic polymer Polymers 0.000 description 3
- 239000002861 polymer material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 150000004984 aromatic diamines Chemical class 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 238000004382 potting Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001947 vapour-phase growth Methods 0.000 description 2
- 229910052695 Americium Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 238000000516 activation analysis Methods 0.000 description 1
- LXQXZNRPTYVCNG-UHFFFAOYSA-N americium atom Chemical compound [Am] LXQXZNRPTYVCNG-UHFFFAOYSA-N 0.000 description 1
- -1 aromatic tetracarboxylic acid Chemical class 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 125000005521 carbonamide group Chemical group 0.000 description 1
- 239000013522 chelant Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000006880 cross-coupling reaction Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229920006015 heat resistant resin Polymers 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- XUAIYERAFHFMGZ-UHFFFAOYSA-N isoindolo[4,5-h]quinazoline-6,8-dione Chemical compound C1=C2C=NC=C2C2=CC=C3C(=O)NC(=O)N=C3C2=C1 XUAIYERAFHFMGZ-UHFFFAOYSA-N 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000006060 molten glass Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920013716 polyethylene resin Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 125000006158 tetracarboxylic acid group Chemical group 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21832688A JPS6477148A (en) | 1979-03-28 | 1988-09-02 | Semiconductor storage device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3548079A JPS55128851A (en) | 1979-03-28 | 1979-03-28 | Semiconductor memory device |
JP21832688A JPS6477148A (en) | 1979-03-28 | 1988-09-02 | Semiconductor storage device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6477148A JPS6477148A (en) | 1989-03-23 |
JPH0546101B2 true JPH0546101B2 (enrdf_load_stackoverflow) | 1993-07-13 |
Family
ID=12442917
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3548079A Granted JPS55128851A (en) | 1979-03-28 | 1979-03-28 | Semiconductor memory device |
JP21832688A Granted JPS6477148A (en) | 1979-03-28 | 1988-09-02 | Semiconductor storage device |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3548079A Granted JPS55128851A (en) | 1979-03-28 | 1979-03-28 | Semiconductor memory device |
Country Status (1)
Country | Link |
---|---|
JP (2) | JPS55128851A (enrdf_load_stackoverflow) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55140249A (en) * | 1979-04-18 | 1980-11-01 | Fujitsu Ltd | Semiconductor device |
JPS5630746A (en) * | 1979-08-22 | 1981-03-27 | Fujitsu Ltd | Semiconductor device |
JPS577144A (en) * | 1980-06-17 | 1982-01-14 | Fujitsu Ltd | Semiconductor device |
JPS5776868A (en) * | 1980-10-30 | 1982-05-14 | Fujitsu Ltd | Forming method for resin protected film |
DE3125284A1 (de) * | 1981-06-26 | 1983-01-13 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum herstellen von bauelementen aus halbleiterscheiben |
JPS584954A (ja) * | 1981-06-30 | 1983-01-12 | Hitachi Ltd | 樹脂封止型半導体メモリー装置 |
JPS5816553A (ja) * | 1981-07-22 | 1983-01-31 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
JPS58147048A (ja) * | 1982-02-25 | 1983-09-01 | Fujitsu Ltd | 半導体装置の製造方法 |
US4468411A (en) * | 1982-04-05 | 1984-08-28 | Motorola, Inc. | Method for providing alpha particle protection for an integrated circuit die |
JPS58223352A (ja) * | 1982-06-21 | 1983-12-24 | Matsushita Electric Ind Co Ltd | 半導体装置 |
US4653175A (en) * | 1984-02-09 | 1987-03-31 | Fairchild Semiconductor Corporation | Semiconductor structure having alpha particle resistant film and method of making the same |
JPS62204575A (ja) * | 1986-03-05 | 1987-09-09 | Matsushita Electric Ind Co Ltd | 薄膜半導体装置およびその製造方法 |
CA2021682C (en) * | 1989-07-21 | 1995-01-03 | Yukio Yamaguchi | Chip-carrier with alpha ray shield |
US5264726A (en) * | 1989-07-21 | 1993-11-23 | Nec Corporation | Chip-carrier |
US7382043B2 (en) * | 2002-09-25 | 2008-06-03 | Maxwell Technologies, Inc. | Method and apparatus for shielding an integrated circuit from radiation |
US7191516B2 (en) | 2003-07-16 | 2007-03-20 | Maxwell Technologies, Inc. | Method for shielding integrated circuit devices |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5166776A (ja) * | 1974-12-06 | 1976-06-09 | Hitachi Ltd | Koshuhahandotaisochi oyobi sonoseizohoho |
JPS5226989A (en) * | 1975-08-22 | 1977-02-28 | Chiyoda Shigyo Kk | Paper bag trnsferring method for heavy packaging paper sewing machine |
JPS53142375A (en) * | 1977-05-18 | 1978-12-12 | Babcock Hitachi Kk | Rotary kiln |
-
1979
- 1979-03-28 JP JP3548079A patent/JPS55128851A/ja active Granted
-
1988
- 1988-09-02 JP JP21832688A patent/JPS6477148A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6477148A (en) | 1989-03-23 |
JPS6228584B2 (enrdf_load_stackoverflow) | 1987-06-22 |
JPS55128851A (en) | 1980-10-06 |