JPH0544664B2 - - Google Patents

Info

Publication number
JPH0544664B2
JPH0544664B2 JP58230377A JP23037783A JPH0544664B2 JP H0544664 B2 JPH0544664 B2 JP H0544664B2 JP 58230377 A JP58230377 A JP 58230377A JP 23037783 A JP23037783 A JP 23037783A JP H0544664 B2 JPH0544664 B2 JP H0544664B2
Authority
JP
Japan
Prior art keywords
compound
substituent
photosensitive
compounds
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP58230377A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60121446A (ja
Inventor
Toshiaki Aoso
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP23037783A priority Critical patent/JPS60121446A/ja
Priority to EP84107587A priority patent/EP0130599B1/en
Priority to DE8484107587T priority patent/DE3473359D1/de
Publication of JPS60121446A publication Critical patent/JPS60121446A/ja
Priority to US07/044,161 priority patent/US4816375A/en
Priority to US07/085,230 priority patent/US4752552A/en
Publication of JPH0544664B2 publication Critical patent/JPH0544664B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • G03F7/0758—Macromolecular compounds containing Si-O, Si-C or Si-N bonds with silicon- containing groups in the side chains
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0755—Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Silver Salt Photography Or Processing Solution Therefor (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Silicon Polymers (AREA)
JP23037783A 1983-06-29 1983-12-06 光可溶化組成物 Granted JPS60121446A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP23037783A JPS60121446A (ja) 1983-12-06 1983-12-06 光可溶化組成物
EP84107587A EP0130599B1 (en) 1983-06-29 1984-06-29 Photosolubilizable composition
DE8484107587T DE3473359D1 (de) 1983-06-29 1984-06-29 Photosolubilizable composition
US07/044,161 US4816375A (en) 1983-06-29 1987-04-30 Photosolubilizable composition with silyl ether or silyl ester compound
US07/085,230 US4752552A (en) 1983-06-29 1987-08-12 Photosolubilizable composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23037783A JPS60121446A (ja) 1983-12-06 1983-12-06 光可溶化組成物

Publications (2)

Publication Number Publication Date
JPS60121446A JPS60121446A (ja) 1985-06-28
JPH0544664B2 true JPH0544664B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-07

Family

ID=16906907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23037783A Granted JPS60121446A (ja) 1983-06-29 1983-12-06 光可溶化組成物

Country Status (1)

Country Link
JP (1) JPS60121446A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2525568B2 (ja) * 1985-01-18 1996-08-21 富士写真フイルム株式会社 光可溶化組成物
JPH067259B2 (ja) * 1985-01-22 1994-01-26 富士写真フイルム株式会社 着色光可溶化組成物
JPH067260B2 (ja) * 1985-01-22 1994-01-26 富士写真フイルム株式会社 光可溶化組成物
JP2607870B2 (ja) * 1985-07-26 1997-05-07 富士写真フイルム株式会社 画像形成方法
JPS6261047A (ja) * 1985-09-12 1987-03-17 Fuji Photo Film Co Ltd 感光性組成物
EP0410606B1 (en) 1989-07-12 1996-11-13 Fuji Photo Film Co., Ltd. Siloxane polymers and positive working light-sensitive compositions comprising the same
JPH0450947A (ja) * 1990-06-15 1992-02-19 Matsushita Electric Ind Co Ltd パターン形成方法
JP2726348B2 (ja) * 1992-02-03 1998-03-11 沖電気工業株式会社 放射線感応性樹脂組成物
JP2944296B2 (ja) 1992-04-06 1999-08-30 富士写真フイルム株式会社 感光性平版印刷版の製造方法
JPH0954437A (ja) 1995-06-05 1997-02-25 Fuji Photo Film Co Ltd 化学増幅型ポジレジスト組成物
JP3591672B2 (ja) 1996-02-05 2004-11-24 富士写真フイルム株式会社 ポジ型感光性組成物
JP3820778B2 (ja) * 1998-11-17 2006-09-13 コニカミノルタホールディングス株式会社 感光性平版印刷版
JP3969909B2 (ja) 1999-09-27 2007-09-05 富士フイルム株式会社 ポジ型フォトレジスト組成物
JP4396443B2 (ja) 2004-08-18 2010-01-13 コニカミノルタエムジー株式会社 感光性平版印刷版の製造方法及び使用方法
JP6493652B2 (ja) * 2014-03-27 2019-04-03 日産化学株式会社 ケイ素含有ポリマー及びその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037549A (ja) * 1983-08-10 1985-02-26 Fuji Photo Film Co Ltd 光可溶化組成物
JPS6052845A (ja) * 1983-09-02 1985-03-26 Japan Synthetic Rubber Co Ltd パタ−ン形成材料

Also Published As

Publication number Publication date
JPS60121446A (ja) 1985-06-28

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees