JPH0543452B2 - - Google Patents

Info

Publication number
JPH0543452B2
JPH0543452B2 JP62064808A JP6480887A JPH0543452B2 JP H0543452 B2 JPH0543452 B2 JP H0543452B2 JP 62064808 A JP62064808 A JP 62064808A JP 6480887 A JP6480887 A JP 6480887A JP H0543452 B2 JPH0543452 B2 JP H0543452B2
Authority
JP
Japan
Prior art keywords
tool
workpiece
axis
polishing
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62064808A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63232956A (ja
Inventor
Yoshitane Tsucha
Hirotaka Fuse
Kazuo Watanabe
Koji Shinoda
Nobuo Nakamura
Manabu Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP6480887A priority Critical patent/JPS63232956A/ja
Publication of JPS63232956A publication Critical patent/JPS63232956A/ja
Priority to US07/401,477 priority patent/US4956944A/en
Publication of JPH0543452B2 publication Critical patent/JPH0543452B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
JP6480887A 1987-03-19 1987-03-19 研磨方法 Granted JPS63232956A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP6480887A JPS63232956A (ja) 1987-03-19 1987-03-19 研磨方法
US07/401,477 US4956944A (en) 1987-03-19 1989-08-29 Polishing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6480887A JPS63232956A (ja) 1987-03-19 1987-03-19 研磨方法

Publications (2)

Publication Number Publication Date
JPS63232956A JPS63232956A (ja) 1988-09-28
JPH0543452B2 true JPH0543452B2 (enExample) 1993-07-01

Family

ID=13268914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6480887A Granted JPS63232956A (ja) 1987-03-19 1987-03-19 研磨方法

Country Status (1)

Country Link
JP (1) JPS63232956A (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57205058A (en) * 1981-06-12 1982-12-16 Hitachi Ltd Abrasion method of non-spherical surface
JPS59102566A (ja) * 1982-12-01 1984-06-13 Hitachi Ltd 自動磨き装置
JPS618269A (ja) * 1984-06-22 1986-01-14 Canon Inc 曲面研摩機

Also Published As

Publication number Publication date
JPS63232956A (ja) 1988-09-28

Similar Documents

Publication Publication Date Title
US4956944A (en) Polishing apparatus
CN100372648C (zh) 抛光的设备和方法
JPH05269659A (ja) 表面を機械加工するための多軸数値制御機械および方法
JPS6327148B2 (enExample)
CN108161646A (zh) 非球面光学元件的智能柔性抛光方法及其所采用的智能柔性抛光装置
JPH0659613B2 (ja) 研削研磨装置及び研削研摩方法
JP3613889B2 (ja) 曲面研磨方法、及び曲面研磨装置
CN110315421B (zh) 一种晶体材料均一化抛光装置及使用方法
JPH0516980B2 (enExample)
JPH057143B2 (enExample)
JPH02504492A (ja) 光学コンポーネントの研摩方法と研摩装置
JPH0543452B2 (enExample)
JP3718934B2 (ja) 曲面研磨方法および曲面研磨装置
JPH032628B2 (enExample)
JP3990205B2 (ja) 研磨装置
CN210435923U (zh) 一种晶体材料均一化抛光装置
JP4208364B2 (ja) 球面創成装置および球面創成方法
JP2001038592A (ja) 研磨方法および研磨装置
JPH09300191A (ja) 研磨装置
JPH0413090B2 (enExample)
JP2704685B2 (ja) ワイヤカット放電加工機における加工方法
JPH0475878A (ja) 研磨装置
JPH0966445A (ja) 研磨装置および研磨方法
JPH03111164A (ja) 研磨加工方法及び装置
JPH0192056A (ja) 倣い研削装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees