JPH054275Y2 - - Google Patents
Info
- Publication number
- JPH054275Y2 JPH054275Y2 JP1984082636U JP8263684U JPH054275Y2 JP H054275 Y2 JPH054275 Y2 JP H054275Y2 JP 1984082636 U JP1984082636 U JP 1984082636U JP 8263684 U JP8263684 U JP 8263684U JP H054275 Y2 JPH054275 Y2 JP H054275Y2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- turntable
- top ring
- wafer
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 claims description 18
- 235000012431 wafers Nutrition 0.000 description 26
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 7
- 238000011017 operating method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984082636U JPS60194457U (ja) | 1984-06-04 | 1984-06-04 | ウエハ−研摩装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984082636U JPS60194457U (ja) | 1984-06-04 | 1984-06-04 | ウエハ−研摩装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60194457U JPS60194457U (ja) | 1985-12-25 |
| JPH054275Y2 true JPH054275Y2 (de) | 1993-02-02 |
Family
ID=30630529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984082636U Granted JPS60194457U (ja) | 1984-06-04 | 1984-06-04 | ウエハ−研摩装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60194457U (de) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4829574A (de) * | 1971-07-16 | 1973-04-19 | ||
| JPS596545A (ja) * | 1982-07-05 | 1984-01-13 | Hitachi Ltd | ウエハ乾燥装置 |
-
1984
- 1984-06-04 JP JP1984082636U patent/JPS60194457U/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4829574A (de) * | 1971-07-16 | 1973-04-19 | ||
| JPS596545A (ja) * | 1982-07-05 | 1984-01-13 | Hitachi Ltd | ウエハ乾燥装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60194457U (ja) | 1985-12-25 |
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