JPH0542591B2 - - Google Patents

Info

Publication number
JPH0542591B2
JPH0542591B2 JP62172163A JP17216387A JPH0542591B2 JP H0542591 B2 JPH0542591 B2 JP H0542591B2 JP 62172163 A JP62172163 A JP 62172163A JP 17216387 A JP17216387 A JP 17216387A JP H0542591 B2 JPH0542591 B2 JP H0542591B2
Authority
JP
Japan
Prior art keywords
mass flow
temperature
sensor
thermal valve
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62172163A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6415588A (en
Inventor
Katsuyuki Sasahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP17216387A priority Critical patent/JPS6415588A/ja
Publication of JPS6415588A publication Critical patent/JPS6415588A/ja
Publication of JPH0542591B2 publication Critical patent/JPH0542591B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Temperature-Responsive Valves (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
JP17216387A 1987-07-09 1987-07-09 Mass flow controller Granted JPS6415588A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17216387A JPS6415588A (en) 1987-07-09 1987-07-09 Mass flow controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17216387A JPS6415588A (en) 1987-07-09 1987-07-09 Mass flow controller

Publications (2)

Publication Number Publication Date
JPS6415588A JPS6415588A (en) 1989-01-19
JPH0542591B2 true JPH0542591B2 (enrdf_load_stackoverflow) 1993-06-29

Family

ID=15936743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17216387A Granted JPS6415588A (en) 1987-07-09 1987-07-09 Mass flow controller

Country Status (1)

Country Link
JP (1) JPS6415588A (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2522241B2 (ja) * 1985-09-06 1996-08-07 石川島播磨重工業株式会社 ポペット形弁の温度制御装置
JPH0743054B2 (ja) * 1985-09-09 1995-05-15 石川島播磨重工業株式会社 ポペツト弁の温度制御方法
JPS6262073A (ja) * 1985-09-11 1987-03-18 Ishikawajima Harima Heavy Ind Co Ltd ポペツト弁の温度制御装置

Also Published As

Publication number Publication date
JPS6415588A (en) 1989-01-19

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Legal Events

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