JPS6415588A - Mass flow controller - Google Patents

Mass flow controller

Info

Publication number
JPS6415588A
JPS6415588A JP17216387A JP17216387A JPS6415588A JP S6415588 A JPS6415588 A JP S6415588A JP 17216387 A JP17216387 A JP 17216387A JP 17216387 A JP17216387 A JP 17216387A JP S6415588 A JPS6415588 A JP S6415588A
Authority
JP
Japan
Prior art keywords
mass flow
flow rate
expansion shaft
thermal valve
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17216387A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542591B2 (enrdf_load_stackoverflow
Inventor
Katsuyuki Sasahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP17216387A priority Critical patent/JPS6415588A/ja
Publication of JPS6415588A publication Critical patent/JPS6415588A/ja
Publication of JPH0542591B2 publication Critical patent/JPH0542591B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Temperature-Responsive Valves (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
JP17216387A 1987-07-09 1987-07-09 Mass flow controller Granted JPS6415588A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17216387A JPS6415588A (en) 1987-07-09 1987-07-09 Mass flow controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17216387A JPS6415588A (en) 1987-07-09 1987-07-09 Mass flow controller

Publications (2)

Publication Number Publication Date
JPS6415588A true JPS6415588A (en) 1989-01-19
JPH0542591B2 JPH0542591B2 (enrdf_load_stackoverflow) 1993-06-29

Family

ID=15936743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17216387A Granted JPS6415588A (en) 1987-07-09 1987-07-09 Mass flow controller

Country Status (1)

Country Link
JP (1) JPS6415588A (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6262071A (ja) * 1985-09-06 1987-03-18 Ishikawajima Harima Heavy Ind Co Ltd ポペツト形弁の温度制御装置
JPS6262073A (ja) * 1985-09-11 1987-03-18 Ishikawajima Harima Heavy Ind Co Ltd ポペツト弁の温度制御装置
JPS6262072A (ja) * 1985-09-09 1987-03-18 Ishikawajima Harima Heavy Ind Co Ltd ポペツト弁の温度制御方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6262071A (ja) * 1985-09-06 1987-03-18 Ishikawajima Harima Heavy Ind Co Ltd ポペツト形弁の温度制御装置
JPS6262072A (ja) * 1985-09-09 1987-03-18 Ishikawajima Harima Heavy Ind Co Ltd ポペツト弁の温度制御方法
JPS6262073A (ja) * 1985-09-11 1987-03-18 Ishikawajima Harima Heavy Ind Co Ltd ポペツト弁の温度制御装置

Also Published As

Publication number Publication date
JPH0542591B2 (enrdf_load_stackoverflow) 1993-06-29

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees