JPH0542099B2 - - Google Patents

Info

Publication number
JPH0542099B2
JPH0542099B2 JP62091973A JP9197387A JPH0542099B2 JP H0542099 B2 JPH0542099 B2 JP H0542099B2 JP 62091973 A JP62091973 A JP 62091973A JP 9197387 A JP9197387 A JP 9197387A JP H0542099 B2 JPH0542099 B2 JP H0542099B2
Authority
JP
Japan
Prior art keywords
electron beam
sample
mask
linear
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62091973A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63259947A (ja
Inventor
Tsuyoshi Nakamura
Hiromitsu Namita
Hidekazu Okabayashi
Yutaka Kawase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62091973A priority Critical patent/JPS63259947A/ja
Publication of JPS63259947A publication Critical patent/JPS63259947A/ja
Publication of JPH0542099B2 publication Critical patent/JPH0542099B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP62091973A 1987-04-16 1987-04-16 線状電子ビ−ム装置 Granted JPS63259947A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62091973A JPS63259947A (ja) 1987-04-16 1987-04-16 線状電子ビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62091973A JPS63259947A (ja) 1987-04-16 1987-04-16 線状電子ビ−ム装置

Publications (2)

Publication Number Publication Date
JPS63259947A JPS63259947A (ja) 1988-10-27
JPH0542099B2 true JPH0542099B2 (enrdf_load_stackoverflow) 1993-06-25

Family

ID=14041469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62091973A Granted JPS63259947A (ja) 1987-04-16 1987-04-16 線状電子ビ−ム装置

Country Status (1)

Country Link
JP (1) JPS63259947A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS63259947A (ja) 1988-10-27

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term