JPS63259947A - 線状電子ビ−ム装置 - Google Patents
線状電子ビ−ム装置Info
- Publication number
- JPS63259947A JPS63259947A JP62091973A JP9197387A JPS63259947A JP S63259947 A JPS63259947 A JP S63259947A JP 62091973 A JP62091973 A JP 62091973A JP 9197387 A JP9197387 A JP 9197387A JP S63259947 A JPS63259947 A JP S63259947A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- sample
- mask
- linear
- electron beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 title claims abstract description 72
- 238000007669 thermal treatment Methods 0.000 abstract 2
- 238000000137 annealing Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 238000001304 sample melting Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62091973A JPS63259947A (ja) | 1987-04-16 | 1987-04-16 | 線状電子ビ−ム装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62091973A JPS63259947A (ja) | 1987-04-16 | 1987-04-16 | 線状電子ビ−ム装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63259947A true JPS63259947A (ja) | 1988-10-27 |
| JPH0542099B2 JPH0542099B2 (enrdf_load_stackoverflow) | 1993-06-25 |
Family
ID=14041469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62091973A Granted JPS63259947A (ja) | 1987-04-16 | 1987-04-16 | 線状電子ビ−ム装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63259947A (enrdf_load_stackoverflow) |
-
1987
- 1987-04-16 JP JP62091973A patent/JPS63259947A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0542099B2 (enrdf_load_stackoverflow) | 1993-06-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |