JPH0540928Y2 - - Google Patents
Info
- Publication number
- JPH0540928Y2 JPH0540928Y2 JP1988061936U JP6193688U JPH0540928Y2 JP H0540928 Y2 JPH0540928 Y2 JP H0540928Y2 JP 1988061936 U JP1988061936 U JP 1988061936U JP 6193688 U JP6193688 U JP 6193688U JP H0540928 Y2 JPH0540928 Y2 JP H0540928Y2
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- polishing surface
- polishing
- runner
- waste liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 claims description 73
- 239000002699 waste material Substances 0.000 claims description 32
- 239000007788 liquid Substances 0.000 claims description 30
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 230000008595 infiltration Effects 0.000 description 4
- 238000001764 infiltration Methods 0.000 description 4
- 239000003082 abrasive agent Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 230000002265 prevention Effects 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988061936U JPH0540928Y2 (enrdf_load_stackoverflow) | 1988-05-11 | 1988-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988061936U JPH0540928Y2 (enrdf_load_stackoverflow) | 1988-05-11 | 1988-05-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01164060U JPH01164060U (enrdf_load_stackoverflow) | 1989-11-15 |
| JPH0540928Y2 true JPH0540928Y2 (enrdf_load_stackoverflow) | 1993-10-18 |
Family
ID=31287576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988061936U Expired - Lifetime JPH0540928Y2 (enrdf_load_stackoverflow) | 1988-05-11 | 1988-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0540928Y2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3902724B2 (ja) * | 1997-12-26 | 2007-04-11 | 株式会社荏原製作所 | 研磨装置 |
| JP2019181689A (ja) * | 2018-04-02 | 2019-10-24 | 株式会社荏原製作所 | 研磨装置及び基板処理装置 |
-
1988
- 1988-05-11 JP JP1988061936U patent/JPH0540928Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01164060U (enrdf_load_stackoverflow) | 1989-11-15 |
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