JPH0540928Y2 - - Google Patents

Description

[Detailed description of the invention] (Field of industrial application) The present invention is a polishing device that has a structure that prevents abrasive grains, machining fluid, and waste fluid from entering the contact surface between the polishing surface plate and the runner of the polishing device. Regarding.

(Prior Art) FIG. 3 is an example of a conventional polishing device to which a hydraulic pressure bearing is applied. A polishing surface plate 1 is installed on the upper surface of a rotating runner 2, and a main shaft 3 is fastened to the lower side of the center of the runner 2. The bearing of the rotating part has a structure that employs a so-called oil dynamic bearing in which the bearing part is immersed in oil. Reference numerals 4 and 5 denote thrust oil dynamic pressure bearings and radial oil dynamic pressure bearings arranged between the runner 2 and the central base 6. The thrust oil dynamic pressure bearing 4 has an extremely small inclined surface as a dynamic pressure generating surface and a precision plane, and the precision plane faces the surface 2' of the runner 2 functioning as a rotor, and It is designed to hold down by receiving dynamic pressure in the vertical direction.
Furthermore, the radial oil dynamic pressure bearing 5 has a precision cylindrical surface in which an extremely small inclined surface is formed as a dynamic pressure generating surface, and the cylindrical surface faces the inner surface 2'' of the runner 2 that functions as a rotor. The bearings 4 and 5 are designed to receive and press dynamic pressure in a direction (horizontal direction) that intersects the axial direction of the polishing surface plate 1.
Dynamic pressure is generated on the sliding surface.

Therefore, the rotation from the motor 8 as a driving source is applied to the pulley 11 suspended and fixed to the main shaft 3 through the pulley 9 and the belt 10, which rotates the runner 2 and the polishing surface plate 1. The polishing sample held by the rollers 12 and 13 is polished.

However, especially in a polishing device having oil hydrodynamic bearings 4 and 5, if waste liquid such as abrasive is mixed into the oil 7, not only will the accuracy of the hydrodynamic bearing deteriorate, but the bearing will no longer function as a bearing. become unable. Therefore, in the conventional polishing apparatus, a cover 14 is attached to the polishing platen 1 or the runner 2 to prevent waste fluid from getting mixed into the oil 7.

FIG. 4 is an exploded perspective view of a conventional waste liquid infiltration prevention structure. A pair of holes 1b and 2a are provided at corresponding positions on the contact surfaces of the runner 2 and the polishing surface plate 1, and are connected to each other using a drive pin 15 to transmit rotation. In addition, a guide 3a of the main shaft is attached to the guide portion 1a.
is inserted. Further, a cover 14 is fixed to the runner 2 or the polishing surface plate 1 with adhesive or welding to prevent abrasives or waste liquid from entering the oil 7 in the oil tank 16, and the cover 14 is fixed to the inside of the waste liquid receiver 17. The frame 18 is attached to the inside of the cover 14. Note that 17a and 17b are an inlet and an outlet for waste liquid.

(Problems to be Solved by the Invention) The configuration of the polishing device and the structure of the waste liquid receiver have been described above. Next, we will discuss structural defects.

In this type of polishing equipment, the polishing surface plate is usually
Prepare multiple sheets and use them by replacing them according to the progress of the work. Furthermore, from the viewpoint of high precision of the sample, the parallelism and flatness of the upper and lower surfaces of the polishing surface plate 1 are very important. In actual work, the upper surface of the polishing surface plate 1 is reprocessed, which is called "flattening", before use. Furthermore, in polishing, it is necessary to replace the polisher at a timely manner. For this reason, fixing the cover 14 to the polishing surface plate 1 with adhesive or the like is extremely inefficient and leads to deterioration of accuracy. Therefore, in the conventional waste liquid infiltration prevention structure, the cover 14 is fixed to the runner 2 with adhesive, but it takes time and effort to manufacture. In addition, the waste liquid receiver 17 is connected to the inner frame 18 by the cover 1.
Since the rotary shaft is attached to the inside of the pulley 11, it takes time and effort to remove the rotary shaft from the pulley 11 when attaching and detaching.

Furthermore, there is a possibility that abrasives and waste liquid may flow into the contact surface between the polishing surface plate 1 and the runner 2, thereby damaging the contact surface and worsening the parallelism and flatness of the polishing surface plate 1. There are also problems.

In view of the above-mentioned problems, the purpose of this invention is to provide a polishing device that eliminates the complexity of workability in a high-precision polishing device, ensures reliability as a high-precision polishing device, and prevents infiltration of waste liquid. shall be.

(Means for Solving the Problems) In order to solve the above problems, the present invention provides a polishing system in which a rotating main shaft driven by a drive source is fastened to the center of a runner, and is removably installed on the upper part of the runner. An elastic ring-shaped belt with an inner diameter smaller than the outer diameter of the polishing surface plate is placed on the outer peripheral side of the polishing surface plate so as not to protrude toward the surface of the polishing surface of the polishing surface plate, and from the lower back surface of the polishing surface plate. Further, a groove approximately concentric with the center of rotation is provided at a predetermined position on the surface of the polishing surface plate that contacts the runner, and the inner frame of the waste liquid receiver is fitted into the groove so as not to hit the groove. The main feature of the present invention is a polishing device that prevents waste liquid from entering, which is characterized by its structure.

Therefore, the present invention attaches an easily removable ring-shaped belt to the outer peripheral side of the polishing surface plate, and
The main feature is that a groove corresponding to the waste liquid receiving frame is provided near the outer periphery of the polishing surface plate to prevent waste liquid from getting mixed into the oil.

(Example) Hereinafter, an example of the present invention will be described with reference to the drawings. Note that the embodiments are merely illustrative, and it goes without saying that various changes and improvements can be made without departing from the spirit of the present invention.

FIG. 1 is a partially sectional view showing an embodiment of the present invention. The drive source, power transmission mechanism, etc. of the polishing device are not shown in the figure because the conventional device shown in FIG. 3 can be applied as appropriate.

The polishing device has a bearing part 20 similar to the conventional one in the center of a central base 19, and a main shaft 3 is attached to a disc-shaped runner 2 installed on this bearing part 20, and the main shaft 3 is rotated by the bearing part 20. freely supported.
Further, a polishing surface plate 1 is removably mounted on a runner 2 constituting a rotating portion of the main shaft 3, which is connected to a drive source (not shown). The polishing surface plate 1 and the runner 2 are a guide portion 1a of the polishing surface plate 1 provided on the main shaft 3.
By inserting the guide 3a of the main shaft into the holes 1b and 2a arranged at the required positions, and by inserting the drive pin 15 into the holes 1b and 2a arranged at the required positions, the pins can be made almost concentrically and without slipping in the direction of rotation. Fixed. Note that 7 is oil filled in the oil tank 16.

Next, details of the waste liquid infiltration prevention structure will be described using FIG.

FIG. 2 is an exploded perspective view illustrating a structure that prevents waste liquid from entering the bearing part during polishing work, in which 21 is an elastic ring-shaped belt, 1 is a polishing surface plate, and 2
3 is a runner, 3 is a main shaft, and 17 is a waste liquid receiver. The polishing surface plate 1 is provided with a concentric groove 22 near the outer periphery of the surface in contact with the runner 2. The groove 22 corresponds to the inner frame 18 of the waste liquid receiver 17, and the groove 22 corresponds to the inner frame 18 of the waste liquid receiver 17.
It is designed not to come in contact with. The ring-shaped belt 21 is attached to the outer periphery of the polishing surface plate 1, and has a shape that does not protrude to the front side of the polishing surface plate 1, but protrudes sufficiently from the back side. Further, the ring-shaped belt 21 can be appropriately selected as long as it can be easily removed and has elasticity that prevents waste liquid from seeping into the inside of the ring-shaped belt 21. A ring-shaped rubber belt with an inner diameter smaller than the outer diameter of the polishing surface plate 1 is recommended because it is inexpensive. It goes without saying that this ring-shaped belt 21 should be seamless.

(Effect of the invention) As explained above, according to the invention, a rotating main shaft driven by a drive source is fastened to the center of a runner, and the outer periphery of a polishing surface plate is removably installed above the runner. A ring-shaped belt having elasticity and an inner diameter smaller than the outer diameter of the polishing surface plate is installed on the side surface so as not to protrude toward the surface of the polishing surface of the polishing surface plate and to protrude beyond the lower back surface of the polishing surface plate. Furthermore, a groove substantially concentric with the center of rotation is provided at a predetermined position on the surface of the polishing surface plate that contacts the runner, and the inner frame of the waste liquid receiver is fitted into the groove so as not to hit the groove. By doing so, there is an inner diameter (or inner periphery) slightly smaller than the outer diameter (or outer periphery) of the polishing surface plate on the outer peripheral side of the polishing surface plate.
Attach a removable elastic ring-shaped belt that is wider than the thickness of the polishing surface plate by utilizing its elasticity, and then set the rotation center at a desired position on the surface of the polishing surface plate that contacts the runner. Almost concentric grooves are provided to correspond to the inner frame of the waste liquid receiver.
The polishing surface plate is placed on the runner and polishing work can be performed by rotating the polishing surface plate, which prevents abrasives and waste liquid from flowing into the contact surface between the polishing surface plate and the runner.
It does not damage the contact surface and deteriorate the parallelism and flatness of the polishing surface plate. In addition, maintenance is easy because the waste liquid receiver can be attached and detached simply by removing the polishing surface plate.

[Brief explanation of the drawing]

FIG. 1 is a partial sectional view of a polishing device according to an embodiment of the present invention, FIG. 2 is an exploded perspective view of a mounting structure for a waste liquid receiver of the present invention, and FIG. 3 is a schematic cross-sectional view of a conventional polishing device. FIG. 4 is an exploded perspective view of a conventional mounting structure for a waste liquid receiver. 1... Polishing surface plate, 2... Runner, 3... Main shaft,
4...Thrust oil dynamic pressure bearing, 5...Radial oil dynamic pressure bearing, 6, 19...Central base, 7...Oil, 8
...Motor, 9...Pulley, 10...Belt, 1
1... Pulley, 14... Cover, 15... Drive pin, 16... Oil tank, 17... Waste liquid receiver, 18
... Inner frame, 20 ... Bearing part, 21 ... Ring-shaped belt, 22 ... Groove, 1a ... Guide part of polishing surface plate, 1b, 2a ... Hole, 3a ... Main shaft guide, 1
7a, 17b... Inflow port and outflow port for waste liquid.

Claims (1)

[Scope of utility model registration request] A rotating main shaft driven by a drive source is fastened to the center of the runner, and an elastic ring with an inner diameter smaller than the outer diameter of the polishing surface plate is attached to the outer peripheral side of the polishing surface plate, which is removably installed above the runner. The shaped belt is mounted so as not to protrude to the surface of the polishing surface of the polishing surface plate and protrudes beyond the lower back surface of the polishing surface plate, and further, the belt is attached to the surface of the polishing surface plate that contacts the runner. 1. A polishing device that prevents waste liquid from entering, characterized in that a groove is provided at a predetermined position substantially concentric with the center of rotation, and the inner frame of the waste liquid receiver is fitted into the groove so as not to hit the groove.